Browsing Presentations by imec author "2c60d19f643e70d5f26a2b97629c1c07241e9290"
Now showing items 21-40 of 128
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Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Besling, Wim; Young, Edward; Conard, Thierry; Zhao, Chao; Vandervorst, Wilfried; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko; Haukka, S. (2001) -
Characterization of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy
Nohira, Hiroshi; Tsai, Wilman; Besling, Wim; Young, Edward; Pétry, Jasmine; Conard, Thierry; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko (2001) -
Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
Kerber, Andreas; Cartier, Eduard; Degraeve, Robin; Roussel, Philippe; Pantisano, Luigi; Kauerauf, Thomas; Groeseneken, Guido; De Gendt, Stefan; Heyns, Marc (2002) -
Chronicle of a (r)evolution foretold
Heyns, Marc (2011) -
Cleaning, rinsing and drying aspects in post-Cu-CMP clean
Fyen, Wim; Vos, Rita; Teerlinck, Ivo; Vrancken, Evi; Grillaert, Joost; Meuris, Marc; Heyns, Marc (1999) -
CMOS scaling beyond the Si roadmap
Heyns, Marc (2015) -
Correlation between haze of the wafer and particle-count on wafers: a new approach to monitor nano-sized particles
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Lux, Marcel; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2002) -
Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
Zhao, Chao; Roebben, G.; Heyns, Marc; Van der Biest, O. (2001) -
Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Zhao, Chao; Richard, Olivier; Bender, Hugo; Houssa, Michel; Carter, Richard; De Gendt, Stefan; Heyns, Marc; Young, Edward; Tsai, Wilman; Roebben, G.; Van der Biest, O.; Haukka, S. (2001) -
Cu deposition on Si surfaces from HF solutions in VLSI microfabrication
Teerlinck, Ivo; Mertens, Paul; Vos, Rita; Meuris, Marc; Heyns, Marc (1996) -
Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen
Houssa, Michel; Heyns, Marc; Stesmans, Andre (2004) -
Demonstration of electrocoagulation as a viable technique to treat (cu-)CMP wastes
Van Hoeymissen, Jan; Trenkler, Daniela; Van den Broeck, Kristel; Van Hoornick, Nausikaa; Heyns, Marc (2000) -
Determination of degradation products in O3/DI processes
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Developments in cleaning technology for critical layers
Heyns, Marc; Arnauts, Sophia; Bearda, Twan; Claes, M.; Cornelissen, Ingrid; De Gendt, Stefan; Doumen, Geert; Fyen, Wim; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Onsia, Bart; Röhr, Erika; Schaekers, Marc; Teerlinck, Ivo; Van Doorne, Patrick; Van Hoeymissen, Jan; Vereecke, Guy; Vos, Rita; Wolke, K. (2000) -
Effect of CMP slurry filtration on wafer defectivity
Devriendt, Katia; Meuris, Marc; Heylen, Nancy; Vrancken, Evi; Grillaert, Joost; Heyns, Marc; Ling, Zhi Ming (1998) -
Effect of Si surface roughness on the current-voltage characteristics of ultra-thin gate oxides
Houssa, Michel; Nigam, Tanya; Mertens, Paul; Heyns, Marc (1998) -
Electrical characteristics of Ge/GeOx(N)/HfO2 gate stacks
Houssa, Michel; De Jaeger, Brice; Delabie, Annelies; Van Elshocht, Sven; Afanasiev, Valeri; Autran, J.L.; Stesmans, Andre; Meuris, Marc; Heyns, Marc (2004) -
Electrical characterization of the metal-vanadium dioxide interface and implications for memory applications
Martens, Koen; Radu, Iuliana; Mertens, Sofie; Shi, Xiaoping; Schaekers, Marc; Tielens, Hilde; Huyghebaert, Cedric; De Gendt, Stefan; Jurczak, Gosia; Afanasev, Valeri; Heyns, Marc; Kittl, Jorge (2011) -
Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
Caymax, Matty; Decoutere, Stefaan; Röhr, Erika; Vandervorst, Wilfried; Heyns, Marc; Sprey, Hessel; Storm, Arjen; Maes, J.W. (1998)