Browsing Presentations by imec author "2c6d88fd7c11426b72f66db2093132ee43644808"
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A 1Mbit HIMOS® flash memory embedded in a 0.35μm CMOS process
Van Houdt, Jan; Tsouhlarakis, Jorgo; Hendrickx, Paul; Vanhorebeek, Guido; Wellekens, Dirk; Haspeslagh, Luc; Deferm, Ludo; Maes, Herman (2000) -
A low-cost poly-sidewall erase HIMOSTM technology for 130-90nm embedded flash memories
Van Houdt, Jan; Haspeslagh, Luc; Wellekens, Dirk; De Vos, Joeri; Hendrickx, Paul; Tsouhlarakis, Jorgo (2004) -
A TDI test imager in embedded CCD in CMOS technology
Ercan, Alper; Robbelein, Jo; De Munck, Koen; Minoglou, Kiki; Lauwers, Anne; Haspeslagh, Luc; De Moor, Piet (2013) -
Characterization of the spatial charge distribution in local charge-trapping memory devices using the charge pumping technique
Rosmeulen, Maarten; Breuil, Laurent; Lorenzini, Martino; Haspeslagh, Luc; Van Houdt, Jan; De Meyer, Kristin (2003) -
Development of reliable EUV detectors
Haspeslagh, Luc (2011) -
ESD issues in MEMS: a case study in micromirrors
Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Haspeslagh, Luc; Witvrouw, Ann; Van Hoof, Chris; Groeseneken, Guido; De Wolf, Ingrid (2008) -
Evaluation of backside passivation using laser annealing in backside illuminated image sensors
Minoglou, Kiki; De Munck, Koen; Malachowski, Karl; Sabuncuoglu Tezcan, Deniz; Everaert, Jean-Luc; Haspeslagh, Luc; Mazzamuto, Fulvio; Toqué-Trésonne, Ines; Huet, Karim; De Moor, Piet (2013) -
Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure
Goux, Ludovic; Russo, G.; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R. (2005) -
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Goux, Ludovic; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Zhen, X.; Kaczer, Ben; Haspeslagh, Luc; Wouters, Dirk; Muller, C.; Caputa, C.; Zambrano, R. (2004) -
Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Goux, Ludovic; Paraschiv, Vasile; Boullart, Werner; Lisoni, Judit; Schwitters, M.; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H. (2004) -
Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
Goux, Ludovic; Xu, Zhen; Paraschiv, Vasile; Schwitters, M.; Lisoni, Judit; Maes, David; Haspeslagh, Luc; Groeseneken, Guido; Zambrano, R.; Wouters, Dirk (2004) -
Integrated CMOS+MEMS : the future ?
Haspeslagh, Luc (2009) -
Integration of a composite SiO2HfO2 interpoly dielectric layer for low voltage polypoly erase in a 0.18μm HIMOSTM memory cell.
Blomme, Pieter; Haspeslagh, Luc; De Vos, Joeri; Lorenzini, Martino; Van Houdt, Jan; De Meyer, Kristin (2004) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schuster, Thomas; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Integration of Pt/PZT/Pt ferroelectric capacitors into 0.5μm CMOS process for embedded FERAM
Wouters, Dirk; Norga, Gerd; Haspeslagh, Luc; Deferm, Ludo; Maes, Herman (1999) -
Integration of PZT ferroelectric capacitors in submicron CMOS processes: results and future challenges
Wouters, Dirk; Norga, Gerd; Bartic, Andrei; Fè, Laura; Haspeslagh, Luc (1999) -
MEMS processing and integration
Haspeslagh, Luc (2009) -
Novel micromirror design with variable pull-in voltage
Beernaert, R.; Podprocky, Tomas; De Coster, Jeroen; Witvrouw, Ann; Haspeslagh, Luc; Avci, Aykut; De Smet, Jelle; De Smet, Herbert (2009) -
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk (2002)