Browsing Presentations by imec author "e6ddd54328764b47118db76e029bb80050dd9148"

A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium

Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Detavernier, Christophe; Griffiths, Hefin (2007)

(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers

Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004)

AApples: Advanced Applications of low temperature epitaxial Si alloys

Caymax, Matty (1998)

Advanced surface preparation leading into the nano-era

Onsia, Bart; De Gendt, Stefan; Delabie, Annelies; Van Elshocht, Sven; Caymax, Matty; Conard, Thierry; Heyns, Marc; Lin, S.; Green, Martin; Tsai, Wilman (2003)

Alternative gate insulator materials for future generation MOSFETs

Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Jos; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, R.; Wilhelm, Rudi; Young, Edward; Zhao, Chao (2001)

Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor

Eneman, Geert; Delabie, Annelies; Van Elshocht, Sven; De Jaeger, Brice; Nicholas, Gareth; Martens, Koen; Brunco, David; Zimmerman, Paul; Houssa, Michel; Pourtois, Geoffrey; Kaczer, Ben; Leys, Frederik; Winderickx, Gillis; Huyghebaert, Cedric; Terzieva, Valentina; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007)

Band alignment between (100)Si and complex rare-earth/transition metal oxides

Afanasiev, Valeri; Stesmans, Andre; Zhao, Chao; Caymax, Matty; Heeg,; Schubert,; Jia, Y.; Schlom, D.; Lucovsky, G. (2004)

Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge layers on Si substrates

Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Meuris, Marc (2007)

Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides

Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2016)

Characteristics and integration of selectively grown strain-relaxed SiGe buffer layers

Caymax, Matty; Delhougne, Romain; Loo, Roger; Eneman, Geert; Verheyen, Peter (2005)

Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

Besling, Wim; Young, Edward; Conard, Thierry; Zhao, Chao; Vandervorst, Wilfried; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko; Haukka, S. (2001)

Characterization of high-k films grown by atomic layer deposition

Vandervorst, Wilfried; Conard, Thierry; Petry, Jasmine; Brijs, Bert; Bender, Hugo; Richard, Olivier; Caymax, Matty; De Gendt, Stefan; Green, Martin; Cartier, Eduard; Copel, M. (2002)

Characterization of the post dry etch cleaning of the silicon surface prior to silicon epitaxial growth

Kim, Young-Chang; Caymax, Matty; Bender, Hugo; Vanhaelemeersch, Serge (1998)

Defect analysis of n-type silicon strained layers

Simoen, Eddy; Loo, Roger; Roussel, Philippe; Caymax, Matty; Bender, Hugo; Claeys, C.; Herzog, H. J.; Blondeel, A.; Clauws, P. (2000)

Defect-free Si thinning by in-situ HCI vapour etching

Loo, Roger; Caymax, Matty (2002)

Defect-free Si thinning by in-situ HCl vapour etching

Loo, Roger; Caymax, Matty; Richard, Olivier; Verheyen, Peter; Collaert, Nadine (2002)

Degradation and recovery of Si1-xGex devices after proton irradiation

Ohyama, Hidenori; Vanhellemont, Jan; Takami, Y.; Hayama, Kiyoteru; Sunaga, H.; Nashiyama, I.; Uwatoko, Y.; Poortmans, Jef; Caymax, Matty (1996)

Difference in the nonlinear optical response of epitaxial Si on Ge(001) grown from SiH4 at 500 °C and from Si3H8 at 350 °C

Valev, Ventsislav; Leys, Frederik; Caymax, Matty; Verbiest, Thierry (2008)

Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM

Hueging, N.; Luysberg, M.; Urban, K.; Buca, D.; Holländer, B.; Mantl, S.; Morschbacher, M.; Fichner, P.F.P.; Loo, Roger; Caymax, Matty (2004)

Effect of deposition and annealing temperature on the structural and mechanical properties of poly SiGe

Sedky, Sherif; Witvrouw, Ann; Caymax, Matty; Roussel, Philippe (2000)