Browsing by Author "Alvarez, David"
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Publication Analysis and optimisation of the 2D-dopant profile in a 90 nm CMOS technology using scanning spreading resistance microscopy
Meeting abstract2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.183Publication Analysis of the two-dimensional-dopant profile in a 90 nm complementary metal-oxide-semiconductor technology using scanning spreading resistance microscopy
Journal article2004-01, Journal of Vacuum Science & Technology B, (22) 1, p.364-368Publication Assessing the performance of two-dimensional dopant profiling techniques
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
Proceedings paper2003, Characterization and Metrology for ULSI Technology, 24/03/2003, p.678-684Publication Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
Proceedings paper2003, Proceedings 33rd European Solid-State Device Research Conference - ESSDERC, 16/09/2003Publication Characterization of vertical resurf diodes using scanning probe microsopy
Oral presentation2002, E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and DevicesPublication Fabrication and characterization of full diamond tips for scanning-spreading resistance microscopy
Journal article2004-06, Microelectronic Engineering, 73-74, p.910-915Publication Fabrication of conductive AFM probes and their use in microelectronics
Oral presentation2003, Veeco SPM Conference and Users MeetingPublication Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Proceedings paper2003-05, Smart Sensors, Actuators, and MEMS, 19/05/2003, p.607-616Publication High resolution 2D scanning spreading resistance microscopy (SSRM) of thin film SOI MOSFETs with ultra short effective channel length
Publication High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Meeting abstract2003, 7th International Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, 27/04/2003, p.184Publication High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Proceedings paper2004, Proceedings of the 34th European Solid-State Device Research Conference - ESSDERC, 21/09/2004, p.101-104Publication New trends in the application of scanning probe techniques in failure analysis
Publication Overview of 2D profiling in Imec
Meeting abstract2003, Veeco SPM User Meeting, 20/03/2003Publication Probing local electrical properties in semiconductors with nanometer resolution
Oral presentation2003, WOG Studiedag Scanning ProbesPublication Probing semiconductor technology and devices with scanning spreading resistance microscopy
Book chapter2007Publication Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM
Oral presentation2003, International Meeting on Seeing at the NanoscalePublication Recent progress and insights in two-dimensional carrier profiling using scanning spreading resistance microscopy
Proceedings paper2003, Characterization and Metrology for ULSI Technology, 24/03/2003, p.685-694