Browsing by Author "De Wolf, Peter"
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Publication 2D profiling with atomic force microscopy
Oral presentation1999, Digital Instruments Users Workshop; April 1999; Dresden, Germany.Publication AFMs reveal 3-D semiconductor features
Journal article1995, Test and Measurement World, (15) 9, p.41-43Publication Carrier Profile Determination in Device Structures using AFM-Based Methods
Oral presentation1995, International Workshop on Semiconductor Characterization: Present Status and Needs; January 1995; Gaithersburg, USA.Publication Characterization of a point-contact on silicon using force microscopy-supported resistance measurements
Journal article1995, Appl. Phys. Lett., (66) 12, p.1530-2Publication Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy
Proceedings paper1999, Design, Test, and Microfabrication of MEMS and MOEMS, 30/03/1999, p.994-1005Publication Comparison of two-dimensional carrier profiles in metal-oxide-semiconductor field-effect transistor structures obtained with scanning spreading resistance microscopy and inverse modeling
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.540-544Publication Contrast reversal in scanning capacitance microscopy imaging
Journal article1998, Applied Physics Letters, (73) 18, p.2597-2599Publication Cross-sectional nano-spreading resistance profiling
Journal article1998, Journal of Vacuum Science and Technology B, (16) 1, p.355-361Publication Cross-sectional nano-srp dopant profiling
Proceedings paper1997, 4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles, 6/04/1997, p.56.1-56.1Publication Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques
Proceedings paper1998, Technical Digest International Electron Devices Meeting - IEDM, 6/12/1998, p.559-562Publication Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
Journal article1996, Scanning Microscopy, (10) 4, p.937-945Publication Electrical scanning probe techniques in semiconductor research
Oral presentation1999, DI-VEECO Users Workshop; September 1999; Bordeaux, France.Publication Epitaxial staircase structure for the calibration of electrical characterisation techniques
Proceedings paper1997, Proceedings 4th Int. Worksh. on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles in Semiconducto, 6/04/1997, p.30.1-30.1Publication Epitaxial staircase structure for the calibration of electrical characterization techniques
Journal article1998, Journal of Vacuum Science and Technology B, (16) 1, p.394-400Publication Evaluating probes for "electrical" atomic force microscopy
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427Publication Evaluating probes for "electrical" atomic force microscopy
Proceedings paper1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436Publication Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
Proceedings paper1998, Materials and Device Characterization in Micromachining, 21/09/1998, p.92-103Publication High resolution dopant/carrier profiling for deep submicron technologies
Oral presentation1999, 9th Canadian Semiconductor Technology Conference; July 1999; Ottawa, Canada.Publication Intercomparison of 2-D carrier profiles in MOSFET structures obtaind with scanning resistance microscopy and inverse modeling
Proceedings paper1999, 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, 28/03/1999, p.148-154
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