Browsing by Author "Kmieciak, Malgorzata"
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Publication CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
Proceedings paper2005-12, Technical Digest International Electron Devices Meeting - IEDM, 5/12/2005, p.661-664Publication Dopant profiling in NixSi1-x gates with SIMS
Proceedings paper2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005Publication Influence of activation annealing and silicidation process on dopant redistribution and pile-up at the NixSiy/SiO2 interface
Proceedings paper2005-05, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 16/05/2005, p.241-248Publication Investigation of Ni fully silicided gates for sub-45 nm CMOS technologies
Journal article2004-08, Microelectronic Engineering, 76, p.349-353Publication Materials issues of Ni fully silicided (FUSI) gates for CMOS applications
Proceedings paper2005-05, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 16/05/2005, p.225-232Publication Mechanisms of arsenic segregation to the Ni2Si/SiO2 interface during Ni2Si formation
Journal article2005, Applied Physics Letters, (87) 18, p.181910-1-181910-3Publication Ni fully silicided gates for 45 nm CMOS applications
Journal article2005-08, Microelectronic Engineering, 82, p.441-448Publication Ni-based silicides for 45 nm CMOS and beyond
Journal article2004, Materials Science and Engineering B, 114-115, p.29-41Publication Scalability of Ni FUSI gate processes: phase and Vt control to 30 nm gate lengths
Proceedings paper2005, Symposium on VLSI Technology. Digest of Technical Papers, 12/06/2005, p.72-73Publication Silicides - Recent advances and prospects
Book chapter2005, Materials for Information Technology. Devices, Interconnects and PackagingPublication Silicides for advanced CMOS devices
Proceedings paper2005, Microscopy of Semiconducting Materials. Proceedings of the 14th Conference, 11/04/2005, p.379-388