Browsing by Author "Nakajima, K."

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Nauwelaerts, Sophie

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Journal article

2002, Nuclear Instruments & Methods in Physics Research B, 190, p.505-509

Publication

Advanced RBS analysis of thin films in micro-electronics

Brijs, Bert

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Deleu, Jeroen

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Nauwelaerts, Sophie

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Nakajima, K.

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Kimura, K.

Proceedings paper

2001, Application of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000., p.470-475

Publication

Characterization of ultra thin layers by Rutherford backscattering spectrometry

Brijs, Bert

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Deleu, Jeroen

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Li, H.

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Loo, Roger

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Nakajima, K.

Proceedings paper

1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.160-169

Publication

Characterization of ultra thin oxynitrides, a general approach

Brijs, Bert

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Deleu, Jeroen

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De Witte, Hilde

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Nakajima, K.

Oral presentation

1999, IBA-14-ECAART-6; July 1999; Dresden, Germany.

Publication

Characterization of ultra thin oxynitrides: a general approach

Brijs, Bert

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Deleu, Jeroen

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De Witte, Hilde

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Nakajima, K.

Journal article

2000, Nuclear Instruments and Methods B, 161-163, p.429-434

Publication

Cluster effect on projected range of 30 keV C60+ in silicon

Morita, Y.

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Nakajima, K.

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Suzuki, M.

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Saitoh, Y.

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Kimura, K.

Journal article

2011, Nuclear Instruments and Methods in Physics Research B, (269) 19, p.2080-2083

Publication

Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe

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Loo, Roger

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Brijs, Bert

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Howard, Dave

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Kimura, K.

Proceedings paper

1998, Epitaxy and Applications of Si-Based Heterostructures, 13/04/1998, p.339-344

Publication

Does NIST database provide reliable effective attenuation lenght for XPS analysis

Nakajima, K.

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Kimura, Kenji

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Oral presentation

2007, 6th International Symposium on Atomic Level Characterizations - ALC

Publication

EXLE-SIMS: dramatically enhanced accuracy for dose loss metrology

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Vos, Rita

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Salima, A.J.

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Merkulov, A.

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Nakajima, K.

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Kimura, K.

Proceedings paper

2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.109-112

Publication

Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

Brijs, Bert

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Nauwelaerts, Sophie

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Oral presentation

2001, 15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.

Publication

Recent developments in nuclear methods in support of semiconductor characterization

Brijs, Bert

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Bender, Hugo

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Janssens, Tom

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