Browsing by Author "Pathangi Sriraman, Hari"

Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

Challenges for line width / line edge roughness (LWR/lER) improvement in Directed Self-Assembly (DSA) advanced patterning

Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations

Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations

Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Dielectrophoretic assembly of suspended single-walled carbon nanotubes

Directed assembly of horizontal suspended carbon nanotubes for NEMS applications

DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

Improved cost-effectiveness of the block co-polymer anneal process for DSA

Line Edge Roughness on Directed Self Assembly: Impact of process conditions

Opportunities and challenges for DSA in logic and memory

Parallel assembly of carbon nanotubes for NEMS applications

Parallel assembly of horizontal carbon nanotubes: with perspectives on integration with Si technology

Quantifying the aggregation factor in carbon nanotube dispersions by absorption spectroscopy

Readying directed self-assembly for patterning in semiconductor manufacturing

The use of eDR-71xx for DSA defect review and automated classification

Towards CMOS-compatible single-walled carbon nanotube resonators