Browsing by Author "Sangameswaran, Sandeep"
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Publication A detailed study of a novel wafer separation method for surface sensitive MEMS wafers
Oral presentation2011, MRS Fall Meeting Symposium TT: Microelectromechanical Systems: Materials and Devices VPublication A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges
Proceedings paper2011, 33rd Annual EOS/ESD Symposium, 11/09/2011Publication A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress
Proceedings paper2009, 31st Annual EOS/ESD Symposium, 30/08/2009, p.3B.5Publication An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS
Oral presentation2010, International ESD Workshop - IEWPublication Applications of laser vibrometry during MEMS device qualification
Oral presentation2009, Optimess - 4th International Conference on Optical Measurement TechniquesPublication Applications of laser-Doppler vibrometry during MEMS device qualification
Proceedings paper2010, Optical Measurement Techniques for Systems and Structures - OPTIMESS, 25/05/2009, p.141-150Publication Behavior of RF MEMS switches under ESD stress
Proceedings paper2010, 32nd Annual EOS/ESD Symposium, 3/10/2010, p.443-449Publication Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness
Proceedings paper2012, IEEE International Reliability Physics Symposium - IRPS, 15/04/2012, p.3.00E-04Publication Electro static discharge in MEMS: sensitivity and protection
Sangameswaran, SandeepOral presentation2008, IMEC Annual PhD DaysPublication Electrostatic discharge (ESD) in microelectromechanical systems (MEMS): sensitivity and protection
Sangameswaran, SandeepPHD thesis2011-12Publication ESD in MEMS: sensitivity and protection
Sangameswaran, SandeepOral presentation2007, IMEC Annual PhD DaysPublication ESD issues in MEMS: a case study in micromirrors
Oral presentation2008, 2nd International ESD Workshop - IEWPublication ESD on-wafer characterization: Is TLP still the right measurement tool?
Journal article2009-10, IEEE Transactions on Instrumentation and Measurement, (58) 10, p.3418-3426Publication ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors
Proceedings paper2008, 30th EOS/ESD Symposium, 7/09/2008, p.249-257Publication ESD-protection of advanced RF and broadband integrated circuits and MEMS
Oral presentation2010, International ESD Workshop - IEWPublication Impact of design factors and environment on the electrostatic discharge sensitivity of MEMS micromirrors
Journal article2010, Microelectronics Reliability, (50) 9_11, p.1383-1387Publication Integrated measurement set-up for ESD in MEMS
Sangameswaran, SandeepOral presentation2009, IMEC Annual PhD DaysPublication Investigating ESD sensitivity in electrostatic SiGe MEMS
Journal article2010, Journal of Micromechanics and Microengineering, (20) 5, p.55005Publication Mechanical response of electrostatic actuators under ESD stress
Proceedings paper2009, Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21/06/2009, p.2110-2113Publication New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer level
Proceedings paper2009, SPIE Europe Microtechnologies for the New Millennium, 4/05/2009, p.73620N