Browsing by Author "Sioncke, Sonja"

15nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process

A new quality metric for III-V/high-k MOS gate stacks based on the frequency dispersion of accumulation capacitance and the CET

A study of the influence of typical wet chemical treatments on the germanium wafer surface

A study of the influence of typical wet chemical treatments on the germanium wafer surface

Adsorption of O2 on Ge(100): Atomic geometry and site-specific electronic structure

Advanced channel materials for the semiconductor industry

Al2O3/InGaAs metal-oxide-semiconductor interface properties: impact of Gd2O3 and Sc2O3 interfacial layers by atomic layer deposition

ALD growth behavior of high-k nanolayers on various substrates characterized by X-Ray Spectrometry in gracing incidence geometry

ALD on high mobility channels: engineering the proper gate stack passivation

ALD on high mobility channels: engineering the proper gate stack passivation

Aluminium oxide atomic layer deposition on semiconductor substrates

Atomic imaging of nucleation of trimethylaluminium on clean H2O functionalized Ge(100) surfaces

Atomic layer deposition of Al2O3 on S-passivated Ge

Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering

Atomic layer deposition of hafnium based gate dielectric layers for CMOS applications

Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation

Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels

Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels

Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

Atomic layer deposition of novel interface layers on III-V channel devices