Browsing by Author "Stephenson, Robert"
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Publication 2D profiling with atomic force microscopy
Oral presentation1999, Digital Instruments Users Workshop; April 1999; Dresden, Germany.Publication Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy
Proceedings paper1999, Design, Test, and Microfabrication of MEMS and MOEMS, 30/03/1999, p.994-1005Publication Contrast reversal in scanning capacitance microscopy imaging
Journal article1998, Applied Physics Letters, (73) 18, p.2597-2599Publication Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques
Proceedings paper1998, Technical Digest International Electron Devices Meeting - IEDM, 6/12/1998, p.559-562Publication Electrical scanning probe techniques in semiconductor research
Oral presentation1999, DI-VEECO Users Workshop; September 1999; Bordeaux, France.Publication Evaluating probes for "electrical" atomic force microscopy
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427Publication Evaluating probes for "electrical" atomic force microscopy
Proceedings paper1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436Publication Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
Proceedings paper1998, Materials and Device Characterization in Micromachining, 21/09/1998, p.92-103Publication High resolution dopant/carrier profiling for deep submicron technologies
Oral presentation1999, 9th Canadian Semiconductor Technology Conference; July 1999; Ottawa, Canada.Publication Nanometer scale characterization of deep submicron devices
Oral presentation1999, Materials Research Society Spring Meeting: Symposium S on Si Front-End Processing - Physics and Technology of Dopant-Defect IntePublication New aspects of nanopotentiometry for complementary metal-oxide-semiconductor transistors
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.586-596Publication New aspects of nanopotentiometry for MOSFET transistors
Proceedings paper1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.188-198Publication Non-monotonic behaviour of the scanning capacitance microscope for large dynamic range samples
Proceedings paper1999, 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, p.193-201Publication Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.405-408Publication One- and two-dimensional dopant/carrier profiling for ULSI
Proceedings paper1998, Characterization and Metrology for ULSI Technology: 1998 International Conference, 23/03/1998, p.617-640Publication Practicalities and limitations of scanning capacitance microscopy for routine IC characterisation
Proceedings paper1999, 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, 28/03/1999, p.411-419Publication Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.555-559Publication Probing semiconductor devices on the nanometer schale
Proceedings paper1999, ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium., p.46-55Publication Scanning probe microscopy of 1-D and 2-D carrier distributions
Oral presentation1998, MRS Spring Meeting 1998. Symposium S: Nanoscale Characterization Using Scanning Probes; April 13-16, 1998; San Francisco, Calif.