Browsing by Author "Tomczak, Yoann"

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Parsons, Gregory

Meeting abstract

2018, 3rd Area Selective Deposition Workshop - ASD, 29/04/2018, p.24-24

Publication

Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on Si3N4 in Sub-50 nanometer Si3N4/amorphous carbon structures

Stevens, Eric

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Parsons, Gregory

Meeting abstract

2018, 18th International Conference on Atomic Layer Deposition-ALD. Featuring the 5th International Atomic Layer Etching Workshop, 29/07/2018, p.AS-TuM5

Publication

Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on silicon ntride with inhibition on amorphous carbon

Stevens, Eric

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Parsons, Gregory

Journal article

2018, Chemistry of Materials, (30) 10, p.3223-3232

Publication

Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction

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Meeting abstract

2019, EuroCVD 2019 / Baltic ALD 2019, 24/06/2019

Publication

Assessing the prospects of atomic layer deposition for two-dimensional materials in microelectronic applications

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Zhang, Haodong

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Schram, Tom

Meeting abstract

2018, Material Science and Engineering Congress - MSE, 26/09/2018

Publication

BEOLC compatiblehigh tunnel magneto resistance perpendicula magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap

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Mertens, Sofie

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Lin, Tsann

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Journal article

2015, Applied Physics Letters, (106) 26, p.262407

Publication

Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides

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Groven, Benjamin

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Heyne, Markus

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Zhang, Haodong

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Oral presentation

2016, Workshop on Atomic Layer Deposition for 2D Materials

Publication

[Co/Ni]-CoFeB hybrid free layer stack materials for high density magnetic random access memory applications

Liu, Enlong

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Lin, Tsann

Journal article

2016, Applied Physics Letters, (108) 13, p.132405

Publication

Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

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Grillo, Fabio

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Marques, Esteban

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Van Ommen, Ruud

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Nyns, Laura

Journal article

2018, Advanced Materials Interfaces, (5) 24, p.1800870

Publication

Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics

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Grillo, Fabio

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Van Ommen, Ruud

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Meeting abstract

2018, Area Selective Deposition Workshop - ASD, 29/04/2018

Publication

Experimental observation of back-hopping with reference layer flipping by high-voltage pulse in perpendicular magnetic tunnel junctions

Kim, Woojin

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Lin, Tsann

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Souriau, Laurent

Journal article

2016, IEEE Transactions on Magnetics, (52) 7, p.3401004

Publication

Free layer effective anisotropy thickness in high TMR top and bottom pinned perpendicular magnetic tunnel junctions

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Mertens, Sofie

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Lin, Tsann

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Liu, Enlong

Meeting abstract

2015, International Conference on Magnetism - ICM, 5/07/2015, p.WE.D.2_O3

Publication

Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures

Stevens, Eric

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Proceedings paper

2017, 17th International Conference on Atomic Layer Deposition - ALD, 15/07/2017

Publication

Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning

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Kissoon, Nicola

Proceedings paper

2019, Extreme Ultraviolet (EUV) Lithography X, 24/02/2019, p.109570S

Publication

Influence of the reference layer composition on the back-end-of-line compatibility of Co/Ni-based perpendicular magnetic tunnel junction stacks

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Lin, Tsann

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Mertens, Sofie

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Liu, Enlong

Journal article

2016, IEEE Transactions on Magnetics, (52) 7, p.3400604

Publication

Insight in growth mechanism of Ru ALD on dielectrics

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Grillo, Fabio

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Hody, Hubert

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Marques, Esteban

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Van Ommen, Ruud

Meeting abstract

2018, 18th International Conference on Atomic Layer Deposition - ALD, 29/07/2018

Publication

Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition

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Heyne, Markus

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Groven, Benjamin

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van Pelt, Thomas

Meeting abstract

2017, 2nd Area Selective Deposition Workshop - ASD, 20/04/2017

Publication

Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide

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Meynaerts, Ben

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