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Browsing by Author "Van Daele, Benny"

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    Advanced carrier depth profiling on Si and Ge with M4PP

    Clarysse, Trudo
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    Eyben, Pierre  
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    Parmentier, Brigitte  
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    Van Daele, Benny
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    Satta, Alessandra
    Proceedings paper
    2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 6/05/2007
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    Advanced carrier depth profiling on Si and Ge with micro four-point probe

    Clarysse, Trudo
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    Eyben, Pierre  
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    Parmentier, Brigitte  
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    Van Daele, Benny
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    Satta, Alessandra
    Journal article
    2008, Journal of Vacuum Science and Technology B, (26) 1, p.317-321
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    Analysis of As, P diffusion and defect evolution during sub-millisecond non-melt laser annealing based on an atomistic kinetic Monte Carlo approach

    Noda, Taiji
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    Vandervorst, Wilfried  
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    Felch, S.
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    Parihar, V.
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    Cuperus, Aldert
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    Mcintosh, R.
    Proceedings paper
    2007, Technical Digest International Electron Devices Meeting - IEDM, 10/12/2007, p.955-958
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    Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions

    Bargallo Gonzalez, Mireia
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    Thomas, Nicole
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    Simoen, Eddy  
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    Verheyen, Peter  
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    Hikavyy, Andriy  
    Proceedings paper
    2007, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7, 7/10/2007, p.47-53
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    Cesium near-surface concentration in low energy, negative mode dynamic SIMS

    Berghmans, Bart
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    Van Daele, Benny
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    Geenen, Luc
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    Conard, Thierry  
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    Franquet, Alexis  
    Journal article
    2008, Applied Surface Science, (255) 4, p.1316-1319
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    Cesium near-surface concentration in low energy, negative mode dynamic SIMS

    Berghmans, Bart
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    Van Daele, Benny
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    Geenen, Luc
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    Conard, Thierry  
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    Franquet, Alexis  
    Meeting abstract
    2007-10, SIMS XVI, 29/10/2007
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    Correlation of transport and structural properties in AlGaN/GaN HEMT: Strain modification by means of AlN interlayers

    Germain, Marianne
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    Leys, Maarten
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    Boeykens, Steven
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    Ruythooren, Wouter  
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    Schreurs, Dominique  
    Oral presentation
    2003, MRS Fall Meeting Symposium Y: GaN and Related Alloys
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    Effective work-function modulation by aluminum-ion implantation for metal-gate technology (poly-Si/TiN/SiO2)

    Singanamalla, Raghunath
    ;
    Yu, HongYu
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    Van Daele, Benny
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    Kubicek, Stefan  
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    De Meyer, Kristin  
    Journal article
    2007, IEEE Electron Device Letters, (28) 12, p.1089-1091
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    Formation of germanium shallow junction by flash annealing

    Satta, Alessandra
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    D'Amore, Antonio
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    Simoen, Eddy  
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    Anwand, W
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    Skorupa, W
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    Clarysse, Trudo
    Journal article
    2007, Nuclear Instruments and Methods B, (257) 1_2, p.157-160
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    Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfaces

    Sarkar, Subhendu
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    Van Daele, Benny
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    Vandervorst, Wilfried  
    Journal article
    2008-08, New Journal of Physics, 10, p.83012
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    Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

    Simoen, Eddy  
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    Brugere, Antoine
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    Satta, Alessandra
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    Firrincieli, Andrea  
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    Van Daele, Benny
    Journal article
    2009, Journal of Applied Physics, (105) 9, p.93538
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    Improvement of ohmic contacts on AlGaN/GaN HEMT's by using in-situ Si3N4 passivation layer

    Derluyn, Joff
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    Van Daele, Benny
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    Boeykens, Steven
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    Cheng, Kai
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    Ruythooren, Wouter  
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    Leys, Maarten
    Proceedings paper
    2005-06, 11th European Workshop on MOVPE, 5/06/2005, p.I01
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    In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

    Nguyen, Duy
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    Loo, Roger  
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    Hikavyy, Andriy  
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    Van Daele, Benny
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    Ryan, Paul
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    Wormington, Paul
    Oral presentation
    2007, 3rd International Workshop on New Group IV Semiconductor Nanoelectronics
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    In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction

    Nguyen, Duy
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    Loo, Roger  
    ;
    Hikavyy, Andriy  
    ;
    Van Daele, Benny
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    Ryan, Paul
    ;
    Wormington, Matthew
    Proceedings paper
    2007, Analytical Techniques for Semiconductor Materials and Process Characterization 5 - ALTECH, 13/09/2007, p.151-160
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    Junction architecture for planar devices

    Pawlak, Bartek  
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    Duffy, R.
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    Hoffmann, Thomas Y.
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    Severi, Simone  
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    Felch, S.B.
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    Eyben, Pierre  
    Proceedings paper
    2007, Advanced Gate Stack, Source/Drain and Channel Engineering for Si-Based CMOS 3: New Materials, Processes and Equipment, 6/05/2007, p.351-364
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    Junction formation in Ge by ion implantation

    Satta, Alessandra
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    Simoen, Eddy  
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    Van Daele, Benny
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    Clarysse, Trudo
    ;
    Nicholas, Gareth
    Proceedings paper
    2007-05, Proceedings International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling - INSIGHT, 6/05/2007, p.297-304
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    Laser annealed junctions: process integration sequence optimization for advanced CMOS technologies

    Hoffmann, Thomas Y.
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    Noda, Taiji
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    Felch, S.
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    Severi, Simone  
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    Parihar, V.
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    Forstner, H.
    Proceedings paper
    2007, Extended Abstracts of the 7th International Workshop on Junction Technology, 8/06/2007, p.137-140
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    Low temperature epitaxy and the importance of moisture control

    Leys, Frederik
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    Hikavyy, Andriy  
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    Machkaoutsan, Vladimir  
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    De Vos, Brecht  
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    Geenen, Luc
    Oral presentation
    2007, 5th International Conferencce on Silicon Epitaxy and Heterostructures - ICSI-5
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    Low temperature epitaxy and the importance of moisture control

    Leys, Frederik
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    Hikavyy, Andriy  
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    Machkaoutsan, Vladimir  
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    De Vos, Brecht  
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    Geenen, Luc
    Journal article
    2008, Thin Solid Films, 517, p.416-418
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    Occurrence of transient enhanced diffusion of B in Ge

    Satta, Alessandra
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    Van Daele, Benny
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    Simoen, Eddy  
    ;
    Vandervorst, Wilfried  
    Oral presentation
    2007, GADEST Conference: Gettering and Defect Engineering in Semiconductor Technology
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