Browsing by Author "Verbist, Agnes"
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Publication A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS
Publication A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal
Proceedings paper2000, Micromachining and Microfabrication Process Technology VI, 17/09/2000, p.130-141Publication A multi-axial strain gage with octagonal shape
Publication A new way to selectively remove Si islands from polycrystalline silicon seed layers made by aluminium-induced crystallization
Journal article2008, Thin Solid Films, (516) 20, p.6907-6911Publication A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
Proceedings paper2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, 20/01/2002, p.661-664Publication A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Proceedings paper2011, 16th International Solid-State Sensors, Acutators and Microsystems Conference - TRANSDUCERS, 5/06/2011, p.982-985Publication Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers
; ; Proceedings paper2011, IEEE 24th International Conference on Micro Electro Mechanical Systems - MEMS, 23/01/2011, p.352-355Publication CMOS foundry-based micromachining
Proceedings paper1995, 6th Micromechanics Europe Workshop - MME, 3/09/1995, p.183-187Publication CMOS foundry-based micromachining
Journal article1996, Journal of Micromechanics and Microengineering, (6) 1, p.122-127Publication Consistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)
Proceedings paper2012, 13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE, 16/04/2012Publication Engineering of acoustic meta-materials with application to MEMS BAW resonators
Proceedings paper2011-06, 16th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS, 5/06/2011, p.930-933Publication Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
Meeting abstract2007-03, Materials for Advanced Metallization - MAM, 4/03/2007, p.1-2Publication HF etching of Si-oxides and Si-nitrides for surface micromachining
; ; ; ; De Caussemaeker, AnnProceedings paper2001, Proceedings of the Sensor Technology Conference 2001, 14/05/2001, p.131-136Publication Highly reliable and extremely stable SiGe micro-mirrors
Proceedings paper2007-01, Technical Digest 20th IEEE International Micro Electro Mechanical Systems Conference - MEMS, 21/01/2007, p.759-762Publication Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications
Proceedings paper2008, Technical Digest International Electron Devices Meeting - IEDM, 15/12/2008, p.655-658Publication Improved liquid phase chromatography separation using sub-micron micromachining technology
Proceedings paper2007-12, Technical Digest International Electron Devices Meeting - IEDM, 10/12/2007, p.839-842Publication IR bolometers made of polycrystalline silicon germanium
Journal article1998, Sensors and Actuators A, A66, p.193-199Publication IR micro bolometers, made of polycrystalline silicon germanium alloys
Proceedings paper1997, Proceedings of the 2nd Round Table of Micro-Nano Technologies for Space, 15/10/1997, p.179-186Publication IR PTSI imagers with integrated microlenses
Oral presentation1996, IR-Colloquium; April 29-30, 1996; Freiburg, Germany.Publication Low temperature radiation detection using micromachined microcalorimeters
Proceedings paper1999, Proceedings 10th International Conference on Solid State Sensors and Actuators - Transducers, 06/06/1999
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