Browsing by author "Somervell, Mark"
Now showing items 1-20 of 25
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Addressing the challenges of Directed Self Assembly implementation
Gronheid, Roel; Pollentier, Ivan; Younkin, Todd; Somervell, Mark; Nafus, Kathleen; Hooge, Josh; Rathsack, Ben; Scheer, Steven; Rincon Delgadillo, Paulina; Nealy, Paul (2011) -
Advances and challenges in dual-tone development process optimization
Fonseca, Carlos; Somervell, Mark; Scheer, Steven; Printz, Wallace; Nafus, Kathleen; Hatakeyama, Shinichi; Kuwahara, Yuhei; Niwa, Takafumi; Bernard, Sophie; Gronheid, Roel (2009) -
Advances in dual-tone development for pitch frequency doubling
Fonseca, Carlos; Somervell, Mark; Scheer, Steven; Kuwahara, Yuhei; Nafus, Kathleen; Gronheid, Roel; Tarutani, Shinji; Enomoto, Yuuchiro (2010) -
Advances in process optimization for dual-tone development as a double patterning technique
Fonseca, Carlos; Somervell, Mark; Bernard, Sophie; Hatakeyama, Shinichi; Nafus, Kathleen; Leeson, Michael; Scheer, Steven; Gronheid, Roel (2008) -
All track directed self-assembly of block copolymers: process flow and origin of defects
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher J.; Wu, Hengpeng; Cao, Yi; Somervell, Mark; Nafus, Kathleen; Nealy, Paul F. (2012) -
Comparison of directed self-assembly integrations
Somervell, Mark; Gronheid, Roel; Hooge, Joshua; Nafus, Kathleen; Rincon Delgadillo, Paulina; Thode, Chris; Younkin, Todd; Matsunaga, Koichi; Rathsack, Ben; Scheer, Steven; Nealy, Paul (2012) -
Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Pathangi Sriraman, Hari; Gronheid, Roel; Van Den Heuvel, Dieter; Rincon Delgadillo, Paulina; Chan, BT; Van Look, Lieve; Bayana, Hareen; Cao, Yi; Her, YoungJun; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Somervell, Mark; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Nealey, Paul (2014) -
Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Gronheid, Roel; Rincon Delgadillo, Paulina; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Parnell, Doni; Chan, BT; Lee, Yu-tsung; Van Look, Lieve; Cao, Yi; Her, YoungJun; Lin, Guanyang; Harukawa, Ryoto; Nagaswami, Venkat; D'Urzo, Lucia; Somervell, Mark; Nealey, Paul (2014) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher; Wu, Hengpeng; Cao, Yi; Lin, Guanyang; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2012) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Nafus, Kathleen; Somervell, Mark; Cao, Yi; Lin, Guanyang (2012) -
DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016) -
EUV RLS performance tradeoffs for a polymer bound PAG resist process
Rathsack, Ben; Hooge, Josh; Somervell, Mark; Scheer, Steve; Nafus, Kathleen; Shite, Hideo; Bradon, Neil; Kitano, Junichi; Gronheid, Roel; Vaglio Pret, Alessandro (2009) -
Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control
Romo Negreira, Ainhoa; Younkin, Todd; Gronheid, Roel; Demuynck, Steven; Vandenbroeck, Nadia; Seo, Takehito; Guerrero, Douglas; Parnell, Doni; Muramatsu, Makoto; Shinichiro, Kawakami; Takashi, Yamauchi; Nafus, Kathleen; Somervell, Mark (2014) -
Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern
Gronheid, Roel; Rincon Delgadillo, Paulina; Younkin, Todd; Pollentier, Ivan; Somervell, Mark; Hooge, Joshua S.; Nafus, Kathleen; Nealey, Paul F. (2012) -
Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen; Cao, Yi; Lin, Guanyang (2012) -
Implementation of self-assembly in a 300mm processing environment
Gronheid, Roel; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen (2012) -
Implementation of templated DSA for via layer patterning at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Cao, Yi; Lin, G.; Somervell, Mark; Fenger, Germain; Fuchimoto, Daisuke (2015) -
Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyang; Cao, Yi; Romo, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2014) -
Origin of defect in directed self-assembly of block copolymers using feature multiplication
Rincon Delgadillo, Paulina; Harukawa, Ryoto; Parnell, Doni; Lee, Yu-tsung; Chan, BT; Lin, Guanyang; Cao, Yi; Nagaswami, Venkat; Somervell, Mark; Nafus, Kathleen; Gronheid, Roel; Nealey, Paul (2013)