Browsing by author "Eyben, Pierre"
Now showing items 41-60 of 217
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Characterization and otimalization of 65nm CMOS technology using scanning spreading resistance microscopy
Eyben, Pierre; De Keersgieter, An; Chramtsov, I.; Fouchier, M.; Janssens, Tom; Vandervorst, Wilfried (2005) -
Characterization of InP growth in nm-sized trenches by a combination of NC-AFM and STM
Mannarino, Manuel; Eyben, Pierre; Chintala, Ravi Chandra; Merckling, Clement; van Dorp, Dennis; Vandervorst, Wilfried (2014) -
Characterization of vertical resurf diodes using scanning probe microsopy
Duhayon, Natasja; Xu, Mingwei; Alvarez, David; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L.; Rochefort, Christelle; Van Dalen, Rob (2002) -
Characterizing the two-dimensional doping concentration inside silicon-nanowires using scanning spreading resistance microscopy
Hantschel, Thomas; Schulz, Volker; Schulze, Andreas; Angeletti, Esteban; Guder, Firat; Schmidt, Volker; Senz, Stephan; Eyben, Pierre; Vandervorst, Wilfried (2009) -
Combining TCAD and advanced metrology techniques to support device integration towards N3
Eyben, Pierre; De Keersgieter, An; Celano, Umberto; Wouters, Lennaert; Chiarella, Thomas; Ritzenthaler, Romain; Mertens, Hans; Richard, Olivier; Paredis, Kristof; Matagne, Philippe; Mitard, Jerome; Horiguchi, Naoto; Goux, Ludovic (2021) -
Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy
Eyben, Pierre; Chintala, Ravi Chandra; Mannarino, Manuel; Nazir, Aftab; Schulze, Andreas; Vandervorst, Wilfried (2013) -
Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond
Ritzenthaler, Romain; Mertens, Hans; Eneman, Geert; Simoen, Eddy; Bury, Erik; Eyben, Pierre; Bufler, Fabian; Oniki, Yusuke; Briggs, Basoene; Chan, BT; Hikavyy, Andriy; Mannaert, Geert; Parvais, Bertrand; Vaisman Chasin, Adrian; Mitard, Jerome; Dentoni Litta, Eugenio; Samavedam, Sri; Horiguchi, Naoto (2021) -
Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures
Hantschel, Thomas; Demeulemeester, Cindy; Eyben, Pierre; Schulz, Volker; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried (2009) -
Conformal doping for FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay; Jurczak, Gosia; Nguyen, Duy; Takeuchi, Shotaro; Leys, Frederik; Loo, Roger; Caymax, Matty; Everaert, Jean-Luc (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Jurczak, Gosia; Pawlak, Bartek; Duffy, Ray (2008) -
Conformal ultra shallow junctions by vapor phase doping with boron
Nguyen, Duy; Leys, Frederik; Takeuchi, Shotaro; Loo, Roger; Caymax, Matty; Eyben, Pierre; Vandervorst, Wilfried (2008-05) -
Counting dopants/atoms in 2D/3D nanoscale structures
Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Kambham, Ajay Kumar; Koelling, Sebastian; Gilbert, Matthieu (2010) -
Damage-free contact mode current sensing SPM: benchmarking PFTUNA vs. C-AFM
Celano, Umberto; Chintala, Ravi Chandra; Hoflijk, Ilse; Moussa, Alain; Vanhaeren, Danielle; Mannarino, Manuel; Nazir, Aftab; Eyben, Pierre; Vandervorst, Wilfried (2013) -
Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Duhayon, Natasja; Clarysse, Trudo; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L. (2002) -
Development and evaluation of the Fast Fourier Transform-SSRM technique
Eyben, Pierre; Bisiaux, Pierre; Vandervorst, Wilfried (2014) -
Development and optimization of FIB-based sample preparation for SSRM
Eyben, Pierre; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Hantschel, Thomas; Vandervorst, Wilfried (2010) -
Development and optimization of scanning spreading resistance microscopy for measuring the two-dimensional carrier profile in solar cell structures
Eyben, Pierre; Seidel, Felix; Hantschel, Thomas; Schulze, Andreas; Lorenz, Anne; Uruena De Castro, Angel; Van Gestel, Dries; John, Joachim; Horzel, Joerg; Vandervorst, Wilfried (2010) -
Development and optimization of scanning spreading resistance microscopy for measuring the two-dimensional carrier profile in solar cell structures
Eyben, Pierre; Seidel, Felix; Hantschel, Thomas; Schulze, Andreas; Lorenz, Anne; Uruena De Castro, Angel; Van Gestel, Dries; John, Joachim; Horzel, Jörg; Vandervorst, Wilfried (2011)