Browsing by author "Mantl, S."
Now showing items 1-20 of 30
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Asymmetric strain relaxation in patterned SiGe layer: a means to enhance carrier mobilities in Si cap layers
Buca, D.; Hollander, B.; Feste, S.; Lenk, S.; Trinkaus, H.; Mantl, S.; Loo, Roger; Caymax, Matty (2007-01) -
Charge pumping and mobility measurements on strained SOI MOSFETs
Schmidt, M.; Gottlob, H. D. B.; Echermeyer, T.; Wahlbrink, T.; Mollenhauer, T.; Baus, M.; Buca, D.M.; Mantl, S.; Reiche, M.; Loo, Roger; Lemme, M.C.; Kurz, H. (2007) -
Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM
Hueging, N.; Luysberg, M.; Urban, K.; Buca, D.; Holländer, B.; Mantl, S.; Morschbacher, M.; Fichner, P.F.P.; Loo, Roger; Caymax, Matty (2004) -
Enhancement of the relaxation of SiGe layers by He ion implantation using a delta-Si:C layer
Buca, D.; Goryll, M.; Hollaender, B.; Trinkaus, H.; Mantl, S.; Loo, Roger; Nguyen, Duy (2007) -
Fabrication and characterization of strained Si-on-insulator (sSOI)
Zhao, Q.T.; Buca, D.; Feste, S.; Goryll, M.; Loo, Roger; Reiche, M.; Mantl, S. (2007) -
Fabrication, characterization and modeling of strained SOI MOSFETs with very large effective mobility
Driussi, F.; Esseni, D.; Selmi, L.; Schmidt, M.; Lemme, M.; Kurz, H.; Buca, D.; Mantl, S.; Luysberg, M.; Loo, Roger; Nguyen, Duy; Reiche, M. (2007) -
Formation of ternary Ni-silicide on relaxed and strained SiGe layers
Zhao, Q.T.; Buca, D.; Lenk, S.; Loo, Roger; Caymax, Matty; Mantl, S. (2004) -
Growth of strained Si on He ion implanted Si/SiGe heterostructures
Buca, D.; Feste, S.; Hollander, B.; Mantl, S.; Loo, Roger; Caymax, Matty; Carius, R.; Schaefer, H. (2005-04) -
He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles
Luysberg, M.; Hueging, N.; Urban, K.; Buca, D.; Holländer, B.; Mantl, S.; Morschbacher, M.; Fichner, P.F.P.; Loo, Roger; Caymax, Matty (2004) -
Improvement of He ion induced SiGe layer relaxation by a thin Si:C layer
Buca, D.; Trinkaus, H.; Holländer, B.; Loo, Roger; Nguyen, Duy; Mantl, S. (2008) -
In-situ TEM on He implantation induced defects in SiGe/Si
Luysberg, Martina; Hueging, N.; Urban, K.; Buca, D.; Holländer, B.; Mantl, S.; Morschbacher, M.; Fichtner, P.F.P.; Loo, Roger; Caymax, Matty (2004) -
Large current enhancement in n-MOSFETs with strained Si on insulator
Mantl, S.; Buca, D.; Zhao, Q.T.; Hollaender, B.; Feste, S.; Luysberg, M.; Reiche, M.; Gösele, U.; Buchholtz, W.; Wei, A.; Horstmann, M.; Loo, Roger; Nguyen, Duy (2007) -
Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructures
Morschbacher, M.J.; da Silva, D.L.; Fichtner, P.F.P.; Oliviero, E.; Behar, M.; Zawislak, F.C.; Hollander, B.; Luysberg, M.; Mantl, S.; Loo, Roger; Caymax, Matty (2004) -
Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer
Chen, Peng; Chu, Paul K.; Höchbauer, T.; Nastasi, M.; Buca, D.; Mantl, S.; Theodore, N. David; Alford, T.L.; Mayer, J. W.; Loo, Roger; Caymax, Matty; Cai, M.; Lau, S. (2004) -
Preparation and characterization of rare earth scandates as alternative gate oxide materials
Wagner, M.; Heeg, T.; Schubert, J.; Zhao, Chao; Richard, Olivier; Caymax, Matty; Afanasiev, Valeri; Mantl, S. (2005) -
Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
Kluth, S.M.; Alvarez, C.; Trellenkamp, St.; Moers, J.; Mantl, S.; Kretz, J.; Vandervorst, Wilfried (2005) -
Strain relaxation of pseudomorphic Si1-xGe/Si(100) heterostructures after Si+ ion implantation
Holländer, B.; Buca, D.; Mörschbächer, M.; Lenk, St.; Mantl, S.; Herzog, H.J.; Hackbarth, Th.; Loo, Roger; Caymax, Matty; Fichtner, P.F.P. (2004) -
Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation
Holländer, B.; Buca, D.M.; Lenk, S.; Mantl, S.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Caymax, Matty; Mörschbächer, M.; Fichtner, P.F.P. (2004) -
Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, St.; Hogg, S.M.; Herzog, H.-J.; Hackbarth, T.; Loo, Roger; Bauer, M. (2003) -
Strained Si on relaxed SiGe made by ion implantation and strain transfer
Mantl, S.; Buca, D.; Holländer, B.; Mörschbächer, M.; Trinkhaus, H.; Luysberg, M.; Hueging, N.; Houben, L.; Carius, R.; Loo, Roger; Caymax, Matty; Schäfer, H. (2004-10)