Browsing by author "Zschaetzsch, Gerd"

3D-carrier profiling in FinFETs using scanning spreading resistance microscopy

Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; De Keersgieter, An; Eneman, Geert; Kambham, Ajay Kumar; Drijbooms, Chris; Schulze, Andreas; Chiarella, Thomas; Horiguchi, Naoto; Hoffmann, Thomas; Eyben, Pierre; Vandervorst, Wilfried (2011)

3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions

Vandervorst, Wilfried; Schulze, Andreas; Eyben, Pierre; Zschaetzsch, Gerd; Koelling, Sebastian; Kumar, Arul; Mody, Jay; Gilbert, Matthieu (2011)

Atom probe tomography for 3D-dopant analysis in FinFET devices

Kambham, Ajay Kumar; Zschaetzsch, Gerd; Sasaki, Yuichiro; Togo, Mitsuhiro; Horiguchi, Naoto; Mody, J.; Florakis, Antonios; Gajula, D.R.; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation

Zschaetzsch, Gerd; Vandervorst, Wilfried; Hoffmann, Thomas; Goossens, Jozefien; Everaert, Jean-Luc; del Agua Borniquel, Jose Ignacio; Poon, T. (2008)

Carrier profiling of a cross-sectioned silicon nanowire by scanning spreading resistance microscopy

Hantschel, Thomas; Schulz, Volker; Zschaetzsch, Gerd; Eyben, Pierre; Verhulst, Anne; Schmidt, Volker; Vereecken, Philippe; Van den Bosch, Geert; Vandervorst, Wilfried (2007)

Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008)

Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel

Horiguchi, Naoto; Zschaetzsch, Gerd; Sasaki, Yuichiro; Kambham, Ajay Kumar; Togo, Mitsuhiro; Cho, Moon Ju; Ragnarsson, Lars-Ake; Hellings, Geert; Mitard, Jerome; Franco, Jacopo; Eneman, Geert; Witters, Liesbeth; Waldron, Niamh; Lin, Dennis; Pantisano, Luigi; Collaert, Nadine; Vandervorst, Wilfried; Thean, Aaron (2012-09)

Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon

Koelling, Sebastian; Richard, Olivier; Bender, Hugo; Uematsu, M.; Schulze, Andreas; Zschaetzsch, Gerd; Gilbert, Matthieu; Vandervorst, Wilfried (2013)

Dopant and carrier profiling for 3D-device architectures

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Eyben, Pierre; Gilbert, Matthieu; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2011)

Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Schatzer, Philipp; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Jurczak, Gosia; Horiguchi, Naoto; Gilbert, Matthieu; Eyben, Pierre; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2010)

FinFETs and their futures

Horiguchi, Naoto; Parvais, Bertrand; Chiarella, Thomas; Collaert, Nadine; Veloso, Anabela; Rooyackers, Rita; Verheyen, Peter; Witters, Liesbeth; Redolfi, Augusto; De Keersgieter, An; Brus, Stephan; Zschaetzsch, Gerd; Ercken, Monique; Altamirano Sanchez, Efrain; Locorotondo, Sabrina; Demand, Marc; Jurczak, Gosia; Vandervorst, Wilfried; Hoffmann, Thomas Y.; Biesemans, Serge (2011)

FinFETs and their futures

Horiguchi, Naoto; Parvais, Bertrand; Chiarella, Thomas; Collaert, Nadine; Veloso, Anabela; Rooyackers, Rita; Verheyen, Peter; Witters, Liesbeth; Redolfi, Augusto; De Keersgieter, An; Brus, Stephan; Zschaetzsch, Gerd; Ercken, Monique; Altamirano Sanchez, Efrain; Locorotondo, Sabrina; Demand, Marc; Jurczak, Gosia; Vandervorst, Wilfried; Hoffmann, Thomas Y.; Biesemans, Serge (2010)

Fundamental study on the impact of C Co-implantation on ultra shallow B junctions

Zschaetzsch, Gerd; Vandervorst, Wilfried; Hoffmann, Thomas Y.; Everaert, Jean-Luc; del Agua Borniquel, Jose Ignacio (2009)

Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

Togo, Mitsuhiro; Sasaki, Yuichiro; Zschaetzsch, Gerd; Boccardi, Guillaume; Ritzenthaler, Romain; Lee, Jae Woo; Khaja, Fareen; Colombeau, Benjamin; Godet, Ludovic; Martin, Patrick; Brus, Stephan; Altamirano Sanchez, Efrain; Mannaert, Geert; Dekkers, Harold; Hellings, Geert; Horiguchi, Naoto; Vandervorst, Wilfried; Thean, Aaron (2013)

Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

Togo, Mitsuhiro; Sasaki, Yuichiro; Zschaetzsch, Gerd; Boccardi, Guillaume; Ritzenthaler, Romain; Lee, Jae Woo; Khaja, F.; Colombeau, B.; Godet, L.; Martin, P.; Brus, Stephan; Altamirano Sanchez, Efrain; Mannaert, Geert; Dekkers, Harold; Hellings, Geert; Horiguchi, Naoto; Vandervorst, Wilfried; Thean, Aaron (2013)

High performance n-mos FinFET by damage-free, conformal extension doping

Zschaetzsch, Gerd; Sasaki, Y.; Hayashi, S.; Togo, Mitsuhiro; Chiarella, Thomas; Kambham, Ajay Kumar; Mody, J.; Douhard, Bastien; Horiguchi, Naoto; Mizuno, B.; Ogura, M.; Vandervorst, Wilfried (2011)

High resolution analysis of high concentration dopant profiles

Koelling, Sebastian; Zschaetzsch, Gerd; Douhard, Bastien; Kimura, K; Buyuklimanli, T.; Vandervorst, Wilfried (2011)

Improved sidewall doping with small implant angle by AsH3 Ion assisted deposition and doping process for scaled NMOS Si bulk FinFETs

Sasaki, Yuichiro; Godet, Ludovic; Chiarella, Thomas; Brunco, David; Rockwell, Tyler; Lee, Jae Woo; Colombeau, Benjamin; Togo, Mitsuhiro; Chew, Soon Aik; Zschaetzsch, Gerd; Noh, Kyung Bong; De Keersgieter, An; Boccardi, Guillaume; Kim, Min-Soo; Hellings, Geert; Martin, Patrick; Vandervorst, Wilfried; Thean, Aaron; Horiguchi, Naoto (2013)

Junction strategies for 1x nm technology node with FINFET and high mobility channel

Horiguchi, Naoto; Zschaetzsch, Gerd; Sasaki, Yuichiro; Kambham, Ajay Kumar; Douhard, Bastien; Togo, Mitsuhiro; Hellings, Geert; Mitard, Jerome; Witters, Liesbeth; Eneman, Geert; Noda, Taiji; Collaert, Nadine; Vandervorst, Wilfried; Thean, Aaron (2012)

Novel approach to conformal FINFET extension doping

Zschaetzsch, Gerd; Hoffmann, Thomas Y.; Horiguchi, Naoto; Hautala, Y.; Shao, Y.; Vandervorst, Wilfried (2011)