Browsing by author "Van Besien, Els"
Now showing items 1-20 of 47
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Air-gap formation by UV-assisted decomposition of CVD material
Pantouvaki, Marianna; Humbert, Aurelie; Van Besien, Els; Camerotto, Elisabeth; Travaly, Youssef; Richard, Olivier; Willegems, Myriam; Volders, Henny; Kellens, Kristof; Daamen, Roel; Hoofman, Romano; Beyer, Gerald (2008) -
Air-gap formation by UV-assisted decomposition of CVD material
Pantouvaki, Marianna; Humbert, Aurelie; Van Besien, Els; Camerotto, Elisabeth; Travaly, Youssef; Richard, Olivier; Willegems, Myriam; Volders, Henny; Kellens, Kristof; Daamen, Roel; Hoofman, Romano; Beyer, Gerald (2008) -
Chemisorption of ALD precursors in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, Leo; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, Thomas; Nyns, Laura; Van Elshocht, Sven (2013) -
Development and evaluation of a-SiC:H films using a dimethylsilacyclopentane precursor as a low -k Cu capping layer in advanced interconnects
Van Besien, Els; Wang, Cong; Verdonck, Patrick; Singh, Arjun; Barbarin, Yohan; Schaekers, Marc; Baklanov, Mikhaïl; Van Elshocht, Sven (2013) -
Development and evaluation of a-SiCO:H films as Cu and moisture diffusion barriers with a low dielectric constant, for advanced interconnects
Van Besien, Els; Singh, Arjun; Barbarin, Yohan; Verdonck, Patrick; Baklanov, Mikhaïl (2013) -
Diamond hexagonal silicon ribbons in silicon
Qiu, Yang; Bender, Hugo; Van Besien, Els; Kim, Min-Soo; Richard, Olivier; Vandervorst, Wilfried (2016) -
Dielectric reliability of 70 nm pitch air-gap interconnect structures
Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald (2011) -
Effect of porogen residue on electrical characteristics of ultra low-k materials
Baklanov, Mikhaïl; Zhao, Larry; Van Besien, Els; Pantouvaki, Marianna (2011) -
Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2011) -
Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Electrical characteristics of P-type bulk Si fin field-effect transistor using solid-source doping with 1-nm phosphosilicate glass
Kikuchi, Yoshiaki; Chiarella, Thomas; De Roest, David; Blanquart, Timothee; De Keersgieter, An; Kenis, Karine; Peter, Antony; Ong, Patrick; Van Besien, Els; Tao, Zheng; Kim, Min-Soo; Kubicek, Stefan; Chew, Soon Aik; Schram, Tom; Demuynck, Steven; Mocuta, Anda; Mocuta, Dan; Horiguchi, Naoto (2016) -
Epitaxial diamond-hexagonal silicon nano-ribbon growth on (001) silicon
Qiu, Yang; Bender, Hugo; Richard, Olivier; Kim, Min-Soo; Van Besien, Els; Vos, Ingrid; de Potter de ten Broeck, Muriel; Mocuta, Dan; Vandervorst, Wilfried (2015) -
Epitaxial growth of diamond-hexagonal silicon on silicon
Qiu, Yang; Bender, Hugo; Richard, Olivier; Kim, Min-Soo; Vos, Ingrid; de Potter de ten Broeck, Muriel; Van Besien, Els; Mocuta, Dan; Vandervorst, Wilfried (2015) -
Evaluation of barrier integrity on ultra low-k films with different porosities
Wang, Cong; Van Besien, Els; Baklanov, Mikhaïl; Verdonck, Patrick (2013) -
Evaluation of Mn-based Cu barriers for interconnect applications
Van Besien, Els; Jourdan, Nicolas; Zhao, Larry; Croes, Kristof; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt (2011) -
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Zhao, Larry; Lofrano, Melina; Croes, Kristof; Van Besien, Els; Tokei, Zsolt; Wilson, Chris; Degraeve, Robin; Kauerauf, Thomas; Beyer, Gerald; Claeys, Cor (2011) -
Fabrication of a CMOS-based imaging chip with monolithically integrated RGB and NIR filters
Vereecke, Bart; Van Besien, Els; Sabuncuoglu Tezcan, Deniz; Spooren, Nick; Tack, Klaas; Lambrechts, Andy (2018) -
Fundamental study of atomic layer deposition in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, L; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, J.; Nyns, Laura; Van Elshocht, Sven (2011) -
Gate-all-around MOSFETs based on vertically stacked horizontal Si nanowires in a replacement metal gate process on bulk Si substrates
Mertens, Hans; Ritzenthaler, Romain; Hikavyy, Andriy; Kim, Min-Soo; Tao, Zheng; Wostyn, Kurt; Chew, Soon Aik; De Keersgieter, An; Mannaert, Geert; Rosseel, Erik; Schram, Tom; Devriendt, Katia; Tsvetanova, Diana; Dekkers, Harold; Demuynck, Steven; Vaisman Chasin, Adrian; Van Besien, Els; Dangol, Anish; Godny, Stephane; Douhard, Bastien; Bosman, Niels; Richard, Olivier; Geypen, Jef; Bender, Hugo; Barla, Kathy; Mocuta, Dan; Horiguchi, Naoto; Thean, Aaron (2016) -
Gate-all-around transistors based on vertically stacked Si nanowires
Mertens, Hans; Ritzenthaler, Romain; Hikavyy, Andriy; Kim, Min-Soo; Tao, Zheng; Wostyn, Kurt; Schram, Tom; Kunnen, Eddy; Ragnarsson, Lars-Ake; Dekkers, Harold; Hopf, Toby; Devriendt, Katia; Tsvetanova, Diana; Chew, Soon Aik; Kikuchi, Yoshiaki; Van Besien, Els; Rosseel, Erik; Mannaert, Geert; De Keersgieter, An; Vaisman Chasin, Adrian; Kubicek, Stefan; Dangol, Anish; Demuynck, Steven; Barla, Kathy; Mocuta, Dan; Horiguchi, Naoto (2017)