Browsing by author "Tomczak, Yoann"
Now showing items 1-20 of 31
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A Co/Ni-based perpendicular magnetic tunnel junction (p-MTJ) stack with improved reference layer for BEOL compatibility
Tomczak, Yoann; Lin, Tsann; Swerts, Johan; Couet, Sebastien; Mertens, Sofie; Liu, Enlong; Kim, Woojin; Sankaran, Kiroubanand; Pourtois, Geoffrey; Tsvetanova, Diana; Souriau, Laurent; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2016) -
Area selective atomic layer deposition: a bottom-up approach for patterning
Delabie, Annelies; Soethoudt, Job; Tomczak, Yoann; Briggs, Basoene; Chan, BT; Tokei, Zsolt; Van Elshocht, Sven; Altamirano Sanchez, Efrain; Stevens, Eric; Parsons, Gregory, N (2018) -
Area-selective atomic layer deposition of TiN, TiO2, and HfO2 for advanced thin film patterning by delayed nucleation on plasma-treated amorphous carbon
Stevens, Eric; Tomczak, Yoann; Chan, BT; Altamirano Sanchez, Efrain; Parsons, Gregory; Delabie, Annelies (2018) -
Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on Si3N4 in Sub-50 nanometer Si3N4/amorphous carbon structures
Stevens, Eric; Tomczak, Yoann; Chan, BT; Altamirano Sanchez, Efrain; Parsons, Gregory; Delabie, Annelies (2018) -
Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on silicon ntride with inhibition on amorphous carbon
Stevens, Eric; Tomczak, Yoann; Chan, BT; Altamirano Sanchez, Efrain; Parsons, Gregory; Delabie, Annelies (2018) -
Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction
Soethoudt, Job; Tomczak, Yoann; Delabie, Annelies (2019) -
Assessing the prospects of atomic layer deposition for two-dimensional materials in microelectronic applications
Groven, Benjamin; Tomczak, Yoann; Nalin Mehta, Ankit; Bender, Hugo; Zhang, Haodong; Schram, Tom; Smets, Quentin; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies (2018) -
BEOLC compatiblehigh tunnel magneto resistance perpendicula magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap
Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Tomczak, Yoann; Sankaran, Kiroubanand; Pourtois, Geoffrey; Kim, Woojin; Meersschaut, Johan; Souriau, Laurent; Radisic, Dunja; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2015) -
Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2016) -
[Co/Ni]-CoFeB hybrid free layer stack materials for high density magnetic random access memory applications
Liu, Enlong; Swerts, Johan; Couet, Sebastien; Mertens, Sofie; Tomczak, Yoann; Lin, Tsann; Spampinato, Valentina; Franquet, Alexis; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud; De Boeck, Jo (2016) -
Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Tomczak, Yoann; Nyns, Laura; Van Elshocht, Sven; Delabie, Annelies (2018) -
Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018) -
Experimental observation of back-hopping with reference layer flipping by high-voltage pulse in perpendicular magnetic tunnel junctions
Kim, Woojin; Couet, Sebastien; Swerts, Johan; Lin, Tsann; Tomczak, Yoann; Souriau, Laurent; Tsvetanova, Diana; Sankaran, Kiroubanand; Donadio, Gabriele Luca; Crotti, Davide; Van Beek, Simon; Rao, Siddharth; Goux, Ludovic; Kar, Gouri Sankar; Furnemont, Arnaud (2016) -
Free layer effective anisotropy thickness in high TMR top and bottom pinned perpendicular magnetic tunnel junctions
Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Tomczak, Yoann; Liu, Enlong; Kim, Woojin; Kar, Gouri Sankar; Van Elshocht, Sven; Furnemont, Arnaud (2015) -
Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures
Stevens, Eric; Tomczak, Yoann; Chan, BT; Altamirano Sanchez, Efrain; Delabie, Annelies; Parsons, Gregory (2017) -
Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning
Vanelderen, Pieter; Blanco, Victor; Mao, Ming; Tomczak, Yoann; De Roest, David; Kissoon, Nicola; Rincon Delgadillo, Paulina; Rispens, Gijsbert; Schiffelers, Guido; Pathak, Abhinav; Lazzarino, Frederic; De Simone, Danilo; De Poortere, Etienne; Mc Manus, Moyra; Piumi, Daniele; Hendrickx, Eric; Vandenberghe, Geert (2019) -
Influence of the reference layer composition on the back-end-of-line compatibility of Co/Ni-based perpendicular magnetic tunnel junction stacks
Tomczak, Yoann; Lin, Tsann; Swerts, Johan; Couet, Sebastien; Mertens, Sofie; Liu, Enlong; Kim, Woojin; Sankaran, Kiroubanand; Pourtois, Geoffrey; Tsvetanova, Diana; Souriau, Laurent; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2016) -
Insight in growth mechanism of Ru ALD on dielectrics
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Hody, Hubert; Marques, Esteban; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018) -
Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition
Delabie, Annelies; Tomczak, Yoann; Heyne, Markus; Groven, Benjamin; van Pelt, Thomas; Zhang, Haodong; De Gendt, Stefan; Van Elshocht, Sven; Caymax, Matty; Radu, Iuliana (2017) -
Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide
Soethoudt, Job; Tomczak, Yoann; Meynaerts, Ben; Chan, BT; Delabie, Annelies (2020)