Browsing by author "Mankelevich, Y."
Now showing items 1-12 of 12
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Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing
Dussart, R.; Lefaucheux, P.; Tillocher, T.; Ranson, P.; Boufnichel, M.; Ljazouli, R.; Zhang, Liping; Mankelevich, Y.; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2013) -
Damage free cryogenic etching of a porous organosilica ultralow-k film
Zhang, Liping; Leffaucheux, P.; Tillocher, T.; Dussart, R.; Mankelevich, Y.; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2013) -
Effect of VUV and EUV radiation on utra low-k materials damage
Braginsky, O.; Kovalev, A.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Zyryanov, S.; Baklanov, Mikhaïl (2013) -
F atoms interaction with nanoporous OSG low-k materials
Rakhimova, T.; Rakhimov, A.; Zyryanov, S.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Novikova, N.; Kurchikov, K.; Baklanov, Mikhaïl (2014) -
Interaction of atomic fluorine with porous low-k SiCOH films: modeling
Palov, A.; Voronina, E.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Zyryanov, S.; Proshina, O.; Baklanov, Mikhaïl (2015) -
Interaction of F atoms with SiCOH ultra low-k films. Part I: Fluorination and damage
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Rakhimov, A.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Kurchikov, K.; Zyryanov, S.; Palov, A.P.; Proshina, O.V.; Maslakov, K.; Baklanov, Mikhaïl (2015) -
Low-k OSG damage and etching by F atoms at lowered temperatures
Zyryanov, S.; Kurchikov, D.; Lopaev, D.; Mankelevich, Y.; Palov, A.; Rakhimova, T.; Voronina, E.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Modelling degradation of PTFE under electron irradiation
Palov, A.; Fujii, H.; Mankelevich, Y.; Rakhimova, T.; Baklanov, Mikhaïl (2012) -
Modification of OSG based low-k films under EUV and VUV exposure
Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.; Lopaev, D.; Kovalev, A.; Vasil'eva, A.; Proshina, O.; Braginsky, O.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2013) -
Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films
Mankelevich, Y.; Voronina, E.; Rakhimova, T.; Palov, A.; Lopaev, D.V.; Zyryanov, S.M.; Baklanov, Mikhaïl (2016) -
Ultra low-k dielectrics damage under VUV and EUV radiation
Zyryanov, S.; Braginsky, O.; Kovaev, A.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Baklanov, Mikhaïl (2012)