Browsing by author "Pathangi Sriraman, Hari"
Now showing items 1-20 of 23
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Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns
Pathangi Sriraman, Hari; Chan, BT; Van Look, Lieve; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Cross, Andrew; Hong, Sung Eun; Nafus, Kathleen; D'Urzo, Lucia; Gronheid, Roel (2015) -
Challenges for line width / line edge roughness (LWR/lER) improvement in Directed Self-Assembly (DSA) advanced patterning
Chan, BT; Pathangi Sriraman, Hari; Singh, Arjun; El Otell, Ziad; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2015) -
Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations
Constantoudis, Vassilios; Kuppuswamy, V.K.M.; Gogolides, Evangelos; Vaglio Pret, Alessandro; Pathangi Sriraman, Hari; Gronheid, Roel (2016) -
Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations
Constantoudis, Vassilios; Papvieros, George; Gogolides, Evangelos; Vaglio Pret, Alessandro; Pathangi Sriraman, Hari; Gronheid, Roel (2017) -
Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Pathangi Sriraman, Hari; Gronheid, Roel; Van Den Heuvel, Dieter; Rincon Delgadillo, Paulina; Chan, BT; Van Look, Lieve; Bayana, Hareen; Cao, Yi; Her, YoungJun; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Somervell, Mark; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Nealey, Paul (2014) -
Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, JiHoon; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryota; Chikashi, Ito; Polli, Marco; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015) -
Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, YiHoon; Lin, G.; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015) -
Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Gronheid, Roel; Rincon Delgadillo, Paulina; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Parnell, Doni; Chan, BT; Lee, Yu-tsung; Van Look, Lieve; Cao, Yi; Her, YoungJun; Lin, Guanyang; Harukawa, Ryoto; Nagaswami, Venkat; D'Urzo, Lucia; Somervell, Mark; Nealey, Paul (2014) -
Dielectrophoretic assembly of suspended single-walled carbon nanotubes
Pathangi Sriraman, Hari; Groeseneken, Guido; Witvrouw, Ann (2012) -
Directed assembly of horizontal suspended carbon nanotubes for NEMS applications
Pathangi Sriraman, Hari; Groeseneken, Guido; Witvrouw, Ann (2011) -
DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016) -
Improved cost-effectiveness of the block co-polymer anneal process for DSA
Pathangi Sriraman, Hari; Stokhof, Maarten; Knaepen, Werner; Vaid, Varun; Mallik, Arindam; Chan, BT; Vandenbroeck, Nadia; Maes, Jan; Gronheid, Roel (2016) -
Line Edge Roughness on Directed Self Assembly: Impact of process conditions
MKuppuswamy, Vijaya Kumar; Williamson, Lance; Pathangi Sriraman, Hari; Seidel, Robert; Gronheid, Roel; Nealey, Paul; Lin, Guanyang; Cao, Yi (2015) -
Opportunities and challenges for DSA in logic and memory
Gronheid, Roel; Singh, Arjun; Doise, Jan; Boeckx, Carolien; Karageorgos, Ioannis; Ryckaert, Julien; Pathangi Sriraman, Hari; Rincon Delgadillo, Paulina; Chan, BT; Vandenberghe, Geert (2016) -
Parallel assembly of carbon nanotubes for NEMS applications
Pathangi Sriraman, Hari (2013-03) -
Parallel assembly of horizontal carbon nanotubes: with perspectives on integration with Si technology
Pathangi Sriraman, Hari; Groeseneken, Guido; Witvrouw, Ann (2010) -
Quantifying the aggregation factor in carbon nanotube dispersions by absorption spectroscopy
Pathangi Sriraman, Hari; Vereecken, Philippe; Klekachev, Alexander; Groeseneken, Guido; Witvrouw, Ann (2014) -
Readying directed self-assembly for patterning in semiconductor manufacturing
Gronheid, Roel; Chan, BT; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; MKuppuswamy, Vijaya Kumar; Doise, Jan; Bekaert, Joost; Rincon Delgadillo, Paulina; Nealey, Paul; Cao, Yi; Her, YoungJun; Sayan, Safak; Parnell, Doni; Romo Negreira, Ainhoa; Somervell, Mark (2014) -
The use of eDR-71xx for DSA defect review and automated classification
Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Bayana, Hareen; Bouckou, Loemba; Brown, Jim; Parisi, Paolo; Gosain, Rohan (2015) -
Towards CMOS-compatible single-walled carbon nanotube resonators
Pathangi Sriraman, Hari; Cherman, Vladimir; Khaled, Ahmad; Groeseneken, Guido; Witvrouw, Ann (2012)