Browsing by author "Donaton, R. A."
Now showing items 1-20 of 29
-
Co silicide formation on SiGeC/Si and SiGe/Si layers
Donaton, R. A.; Maex, Karen; Vantomme, Andre; Langouche, G.; Morciaux, Y.; St. Amour, A.; Sturm, J. C. (1997) -
Comparison of Co silicidation on SiGe and SiGeC alloys
Donaton, R. A.; Maex, Karen; Vantomme, Andre; St. Amour, A.; Sturm, J. C. (1996) -
CoSi2 formation in the presence of interfacial silicon oxide
Detavernier, C.; Van Meirhaeghe, R. L.; Cardon, F.; Donaton, R. A.; Maex, Karen (1999) -
Critical issues in the integration of Copper and low-k dielectrics
Donaton, R. A.; Coenegrachts, Bart; Maex, Karen; Struyf, Herbert; Vanhaelemeersch, Serge; Beyer, Gerald; Richard, Emmanuel; Vervoort, Iwan; Fyen, Wim; Grillaert, Joost; van der Groen, Sonja; Stucchi, Michele; De Roest, David (1999) -
EFTEM study of plasma etched low-k Si-O-C dielectrics
Hens, S.; Bender, Hugo; Donaton, R. A.; Maex, Karen; Vanhaelemeersch, Serge; Van Landuyt, J. (2001) -
Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
Yamagishi, Hajime; Tokei, Zsolt; Beyer, Gerald; Donaton, R. A.; Bender, Hugo; Nogami, T.; Maex, Karen (2000) -
Electron microscopic studies of Co- and Ti-germanosilicide films formed on SiGe layers
Jin, S.; Donaton, R. A.; Bender, Hugo; Maex, Karen (1998) -
Electronic Transport in Metallic Iron Disilicide
Kyllesbech Larsen, K.; Van Hove, Marleen; Lauwers, A.; Donaton, R. A.; Maex, Karen; Van Rossum, Marc (1994) -
Formation of continuous and ultra-thin PtSi layers for infrared detector applications
Donaton, R. A.; Jin, S.; Bender, Hugo; Maex, Karen; Vantomme, Andre; Langouche, G. (1998) -
Formation of ultra-thin PtSi layers with a 2-step silicidation process
Donaton, R. A.; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G. (1997) -
Growth of epitaxial b-FeSi2 on (100) silicon using Fe-Ti-Si diffusion couples
Kyllesbech Larsen, K.; Tavares, J.; Bender, Hugo; Donaton, R. A.; Lauwers, A.; Maex, Karen (1995) -
High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene
Jenei, Snezana; Decoutere, Stefaan; Winderickx, Gillis; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Vos, I.; Jaenen, Patrick; Carbonell, Laure; De Jaeger, Brice; Donaton, R. A.; Vanhaelemeersch, Serge; Maex, Karen; Nauwelaers, Bart (2001) -
Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene
Waeterloos, Joost; Shaffer, E. O.; Stokich, T.; Hetzner, J.; Price, D.; Booms, L.; Donaton, R. A.; Beyer, Gerald; Coenegrachts, Bart; Caluwaerts, Rudy; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Sjjmus, B.; Vos, I.; Maex, Karen; Komiya, Takayuki; Iwashita, J. M. (2001) -
Integration of Cu and low-K dielectrics: effect of hard mask and dry etch on electrical performance of damascene structures
Donaton, R. A.; Coenegrachts, Bart; Maenhoudt, Mireille; Pollentier, Ivan; Struyf, Herbert; Vanhaelemeersch, Serge; Vos, I.; Meuris, Marc; Fyen, Wim; Beyer, Gerald; Tokei, Zsolt; Stucchi, Michele; Vervoort, Iwan; De Roest, David; Maex, Karen (2001) -
Integrations of Cu and low-k dielectrics: effect of hard mask dry etch and post-CMP clean on electrical performance of damascene structures
Donaton, R. A.; Coenegrachts, Bart; Maenhoudt, Mireille; Pollentier, Ivan; Struyf, Herbert; Vanhaelemeersch, Serge; Grillaert, Joost; Fyen, Wim; Beyer, Gerald; Stucchi, Michele; Richard, Emmanuel; Vervoort, Iwan; De Roest, David; Maex, Karen (2000) -
Interaction between Co and SiO2
Kondoh, Eiichi; Donaton, R. A.; Jin, S.; Bender, Hugo; Vandervorst, Wilfried; Maex, Karen (1998) -
Ion-bombardment effects on PtSi/n-Si Schottky contacts studied by ballistic electron emission microscopy
Ruttens, Gerlinde; Qu, X. P.; Zhu, S. Y.; Li, Bing-Zong; Detavernier, C.; Van Meirhaeghe, R. L.; Cardon, F.; Donaton, R. A.; Maex, Karen (2000) -
Ion-induced amorphization and regrowth of C49 and C54 TiSi2
Mohadjeri, Babak; Maex, Karen; Donaton, R. A.; Bender, Hugo (1999) -
Maki-Thompson corrections in thin superconducting PtSi films nearby T-c
Kvon, Z. D.; Baturina, T. I.; Donaton, R. A.; Baklanov, Mikhaïl; Kostrikin, M. N.; Maex, Karen; Olshanetsky, E. B.; Portal, J. C. (2000) -
Material characteristics and damascene patterning of a fluoropolymer low-k film
Struyf, Herbert; Donaton, R. A.; Lepage, Muriel; Lanckmans, Filip; Vereecke, Guy; Maex, Karen; Vanhaelemeersch, Serge; Scheid, D. (2000)