Browsing by author "Milenin, Alexey"
Now showing items 41-60 of 77
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Memory node and oxide-nitride-oxide gate stack patterning for a bi-layer poly-silicon channel
Paraschiv, Vasile; Vecchio, Emma; Milenin, Alexey; Kar, Gouri Sankar; Demand, Marc; Coenegrachts, Bart; Vertommen, Johan; Boullart, Werner (2011) -
Metal hard-mask based double patterning for 22nm and beyond
Struyf, Herbert; de Marneffe, Jean-Francois; Goossens, Danny; Hendrickx, Dirk; Huffman, Craig; Kunnen, Eddy; Lazzarino, Frederic; Milenin, Alexey; Shamiryan, Denis; Urbanowicz, Adam; Vandervorst, Alain; Boullart, Werner (2010) -
Modeling fluorocarbon plasmas used for etching of Si
Tinck, Stefan; Milenin, Alexey; Bogaerts, Annemie (2013) -
N7 FinFET self-aligned quadruple patterning modeling
Baudot, Sylvain; Guissi, Sofiane; Milenin, Alexey; Ervin, Joe; Schram, Tom (2018) -
Nanowires for microelectronics: realistic perspectives for on-wafer Si-compatible growth and applications
Iacopi, Francesca; Vereecken, Philippe; Eichhammer, Yann; Moelans, Nele; Blanpain, Bart; Rooyackers, Rita; Vandooren, Anne; Vanherle, Wendy; Takeuchi, Shotaro; Hikavyy, Andriy; Loo, Roger; Milenin, Alexey; Arstila, Kai; Bender, Hugo; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2010) -
On characterization of etch processes in TCP reactor with PlasmaVolt X2 sensor wafer
Milenin, Alexey; de Marneffe, Jean-Francois; Struyf, Herbert; Boullart, Werner; Arleo, Paul (2010) -
Patterning aspects of SiGe/Ge BFFT fabrication
Milenin, Alexey; Witters, Liesbeth; Demand, Marc (2013) -
Patterning challenges in advanced device architectures: FinFETs to nanowire
Horiguchi, Naoto; Milenin, Alexey; Tao, Zheng; Hody, Hubert; Altamirano Sanchez, Efrain; Veloso, Anabela; Witters, Liesbeth; Waldron, Niamh; Ragnarsson, Lars-Ake; Kim, Min-Soo; Kikuchi, Yoshiaki; Mertens, Hans; Raghavan, Praveen; Piumi, Daniele; Collaert, Nadine; Barla, Kathy; Thean, Aaron (2016) -
Performance and reliability of high-mobility Si0.55Ge0.45 p-channel FinFETs based on epitaxial cladding of Si fins
Mertens, Hans; Ritzenthaler, Romain; Hikavyy, Andriy; Franco, Jacopo; Lee, Jae Woo; Brunco, David; Eneman, Geert; Witters, Liesbeth; Mitard, Jerome; Kubicek, Stefan; Devriendt, Katia; Tsvetanova, Diana; Milenin, Alexey; Vrancken, Christa; Geypen, Jef; Bender, Hugo; Groeseneken, Guido; Vandervorst, Wilfried; Barla, Kathy; Collaert, Nadine; Horiguchi, Naoto; Thean, Aaron (2014) -
Plasma etching: from micro- to nanoscale device manufacturing
Shamiryan, Denis; Paraschiv, Vasile; Milenin, Alexey; Boullart, Werner; Baklanov, Mikhaïl (2008) -
Practical steps towards wafer-scaled III-V vertical FETs fabrication
Milenin, Alexey; Veloso, Anabela; Collaert, Nadine; Piumi, Daniele (2017) -
Record 47 mV/dec top-down vertical nanowire InGaAs/GaAsSb tunnel FETs
Alian, AliReza; El Kazzi, Salim; Verhulst, Anne; Milenin, Alexey; Pinna, Nicolo; Ivanov, Tsvetan; Lin, Dennis; Mocuta, Dan; Collaert, Nadine (2018) -
Record performance top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheets
Ramesh, Siva; Ivanov, Tsvetan; Putcha, Vamsi; Alian, AliReza; Sibaja-Hernandez, Arturo; Rooyackers, Rita; Camerotto, Elisabeth; Milenin, Alexey; Pinna, Nicolo; El Kazzi, Salim; Veloso, Anabela; Lin, Dennis; Lagrain, Pieter; Favia, Paola; Collaert, Nadine; De Meyer, Kristin (2017) -
Resistance and capacitance measurements of the films deposited on a planar Langmuir probe
Samara, Vladimir; Brouri, Mohand; de Marneffe, Jean-Francois; Milenin, Alexey; Boullart, Werner (2011-11) -
Roughness study of a template for hetero-integrated FinFET
Baranov, Gleb; Milenin, Alexey; Baklanov, Mikhaïl (2015) -
Seedless templated growth of hetero-nanostructures for novel microelectronics devices
Iacopi, Francesca; Rooyackers, Rita; Loo, Roger; Vanherle, Wendy; Milenin, Alexey; Arstila, Kai; Verhulst, Anne; Takeuchi, Shotaro; Bender, Hugo; Caymax, Matty; Hantschel, Thomas; Vandooren, Anne; Vereecken, Philippe; De Gendt, Stefan; Heyns, Marc (2009) -
Selective etch of Si and SiGe for gate-all-around device architecture
Wostyn, Kurt; Sebaai, Farid; Rip, Jens; Mertens, Hans; Witters, Liesbeth; Loo, Roger; Hikavyy, Andriy; Milenin, Alexey; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; Mertens, Paul; De Gendt, Stefan; Holsteyns, Frank (2015-10) -
Selective oxidation of SiGe less than 50% versus Si using Low Temperature Steam Anneal at T less than or equal to 650°C
Wostyn, Kurt; Crovato, Nicola; Blancher, Ken; Van Bortel, Thomas; Kimura, Yosuke; Mertens, Hans; Vaisman Chasin, Adrian; Conard, Thierry; Douhard, Bastien; Meersschaut, Johan; Steenbergen, Johnny; Rondas, Dirk; Van Opstal, Tinneke; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; Holsteyns, Frank; Horiguchi, Naoto (2018-05) -
Self-aligned double patterning process for subtractive Ge Fin fabrication at 45-nm pitch
Milenin, Alexey; Witters, Liesbeth; Barla, Kathy; Thean, Aaron (2016) -
Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
Baudot, Sylvain; Soussou, Assawer; Milenin, Alexey; Hopf, Toby; Wang, Shouhua; Weckx, Pieter; Vincent, Benjamin; Ervin, Joe; Demuynck, Steven (2019)