Browsing by author "Petersen, Dirch"

Accurate micro Hall effect measurement on scribe line pads

Osterberg, Frederik; Petersen, Dirch; Wang, Fei; Rosseel, Erik; Vandervorst, Wilfried; Hansen, Ole (2009)

Advanced carrier depth profiling on Si and Ge with M4PP

Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch; Folmer Nielsen, Peter (2007)

Fast micro Hall effect measurements on small pads

Ĝsterberg, Frederik Westergaard; Petersen, Dirch; Nielsen, Peter; Rosseel, Erik; Vandervorst, Wilfried; Hansen, Ole (2011)

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Petersen, Dirch; Hansen, Olaf; Clarysse, Trudo; Goossens, Jozefien; Rosseel, Erik; Vandervorst, Wilfried; Lin, Rong; Nielsen, Peter (2008)

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Petersen, Dirch; Hansen, Ole; Lin, Rong; Nielsen, P.F.; Clarysse, Trudo; Goossens, Jozefien; Rosseel, Erik; Vandervorst, Wilfried (2008)

Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

Rosseel, Erik; Vandervorst, Wilfried; Clarysse, Trudo; Goossens, Jozefien; Moussa, Alain; Lin, Rong; Petersen, Dirch; Nielsen, Peter; Hansen, Otto; Bennett, Nick; Cowern, Nick (2008)

In-line sheet resistance measurements of nanometer-wide semiconducting fins

Bogdanowicz, Janusz; Folkersma, Steven; Schulze, Andreas; Moussa, Alain; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Petersen, Dirch; Witthoft, Maria-Louise; Hansen, Ole; Henrichsen, Henrik; Nielsen, Peter; Vandervorst, Wilfried (2017)

Micro probe carrier profiling of ultra-shallow structures in germanium

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Eyben, Pierre; Douhard, Bastien; Vandervorst, Wilfried; Nielsen, Peter; Lin, Rong; Petersen, Dirch; Wang, Fei; Hansen, Ole (2010)

Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

Rosseel, Erik; Petersen, Dirch; Osterberg, Frederik; Hansen, Ole; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried; Ortolland, Claude; Hoffmann, Thomas Y.; Chan, Philip; Salnik, Alex; Nicolaides, Lena (2009)

On the analysis of the activation mechanisms of sub-melt laser anneals

Clarysse, Trudo; Bogdanowicz, Janusz; Goossens, Jozefien; Moussa, Alain; Rosseel, Erik; Vandervorst, Wilfried; Petersen, Dirch; Lin, Rong; Nielsen, P.F.; Hansen, Ole; Merklin, G.; Bennett, N.S.; Cowern, N.E.B. (2008)

Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Cornagliotti, Emanuele; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch (2009)

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch (2010)

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch; Hansen, Ole; Hansen, Torben; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick; Cowern, Nick (2010)

Sheet-resistance measurements in nanometer-wide conductive lines

Bogdanowicz, Janusz; Folkersma, Steven; Sergeant, Stefanie; Schulze, Andreas; Paredis, Kristof; Celano, Umberto; Kunert, Bernardette; Guo, Weiming; Mols, Yves; Petersen, Dirch; Witthoft, Maria-Louise; Hansen, Ole; Henrichsen, Henrik; Nielsen, Pieter; Vandervorst, Wilfried (2017)