Browsing by author "Nealey, Paul"

Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering

Suh, Hyo-Seon; Rincon Delgadillo, Paulina; Chen, Xuenxuen; Wan, Lingshu; Jiang, Zhang; Strzalka, Joseph; Wang, Jin; Chen, Wei; Gronheid, Roel; Nealey, Paul (2014)

Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

Suh, Hyu Seon; Chen, Xuanxuan; Rincon Delgadillo, Paulina; Jiang, Zhang; Strzalka, Joseph; Wang, Jin; Chen, Wei; Gronheid, Roel; de Pablo, Juan; Ferrier, Nicola; Doxastakis, Manolis; Nealey, Paul (2016)

Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012)

Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns

Pathangi Sriraman, Hari; Gronheid, Roel; Van Den Heuvel, Dieter; Rincon Delgadillo, Paulina; Chan, BT; Van Look, Lieve; Bayana, Hareen; Cao, Yi; Her, YoungJun; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Somervell, Mark; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Nealey, Paul (2014)

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, JiHoon; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryota; Chikashi, Ito; Polli, Marco; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015)

Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, YiHoon; Lin, G.; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015)

Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Gronheid, Roel; Rincon Delgadillo, Paulina; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Parnell, Doni; Chan, BT; Lee, Yu-tsung; Van Look, Lieve; Cao, Yi; Her, YoungJun; Lin, Guanyang; Harukawa, Ryoto; Nagaswami, Venkat; D'Urzo, Lucia; Somervell, Mark; Nealey, Paul (2014)

Defect source analysis of directed self-assembly process

Rincon Delgadillo, Paulina; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013)

Defect source analysis of directed self-assembly process (DSA of DSA)

Rincon Delgadillo, Paulina; Harukawa, Ryota; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013)

Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication

Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher; Wu, Hengpeng; Cao, Yi; Lin, Guanyang; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2012)

Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication

Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Nafus, Kathleen; Somervell, Mark; Cao, Yi; Lin, Guanyang (2012)

Directed self-assembly of PS-b-PMMA with ionic liquid addition

Chen, Xuanxuan; Nealey, Paul; Rincon Delgadillo, Paulina; Gronheid, Roel; Seo, Takehito; Matsumiya, Tasuku; Ohmori, Katsumi; Maehashi, Takaya; Kawaue, Akiya (2015)

Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns

Wan, Ling-Shu; Rincon Delgadillo, Paulina; Gronheid, Roel; Nealey, Paul (2013)

Directed self-assembly process integration – fin patterning approaches and challenges

Sayan, Safak; Chan, BT; Gronheid, Roel; Van Roey, Frieda; Kim, Min-Soo; Williamson, Lance; Nealey, Paul (2014)

Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings

Doxastakis, Manolis; Suh, Hyo Seon; Chen, Xuanxuan; Rincon Delgadillo, Paulina; Wan, Lingshu; Williamson, Lance; Jiang, Zhang; Strzalka, Joseph; Wang, Jin; Chen, Wei; Ferrier, Nicola; Ramirez-Hernandez, Abelardo; de Pablo, Juan; Gronheid, Roel; Nealey, Paul (2015)

Impact of annealing temperature on DSA process: toward faster assembly kinetics

Suh, Hyo Seon; Nair, Vineet Vijayakrishnan; Rincon Delgadillo, Paulina; Doise, Jan; Lorusso, Gian; Nealey, Paul; Monreal, Victor; Baskaran, Durairaj; Cao, Yi; Padmanaban, Munirathna; Li, Jin; Kato, Takeshi; Sutani, Takumichi; Ishimoto, Toru; Ikota, Masami; Koshihara, Shunsuke (2018)