Browsing by author "Chamirian, Oxana"
Now showing items 1-20 of 25
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Applications of Ni-based silicides to 45 nm CMOS and beyond
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Pawlak, Malgorzata; Van Dal, Mark; Akheyar, Amal; de Potter de ten Broeck, Muriel; Kottantharayil, Anil; Pourtois, Geoffrey; Lindsay, Richard; Maex, Karen (2004) -
Co and Ni-based silicides for sub-45nm CMOS technologies
Chamirian, Oxana (2005-11) -
Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
Akheyar, Amal; Lauwers, Anne; Kittl, Jorge; de Potter de ten Broeck, Muriel; Chamirian, Oxana; Jonckheere, Rik; Leunissen, Peter; Van Dal, Mark; Lindsay, Richard; Tempel, Georg; Maex, Karen (2003) -
CoSi2 formation from CoxNi1-x/Ti system
Chamirian, Oxana; Lauwers, Anne; Demeurisse, Caroline; Guérault, H.; Vantomme, Andre; Maex, Karen (2002) -
Effects of alloying on properties of NiSi for CMOS applications
Van Dal, Mark; Akheyar, Amal; Kittl, Jorge; Chamirian, Oxana; de Potter de ten Broeck, Muriel; Demeurisse, Caroline; Lauwers, Anne; Maex, Karen (2004) -
Investigation of Ni fully silicided gates for sub-45 nm CMOS technologies
Kmieciak, Malgorzata; Kittl, Jorge; Chamirian, Oxana; Veloso, Anabela; Lauwers, Anne; Schram, Tom; Maex, Karen; Vantomme, Andre (2004-08) -
Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions
Lauwers, Anne; de Potter de ten Broeck, Muriel; Lindsay, Richard; Chamirian, Oxana; Demeurisse, Caroline; Vrancken, Christa; Maex, Karen (2002) -
Low temperature spike anneal for Ni-Silicide formation
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Lindsay, Richard; de Potter de ten Broeck, Muriel; Demeurisse, Caroline; Vrancken, Christa; Maex, Karen (2004-11) -
Mapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide films
Cannaerts, M.; Chamirian, Oxana; Maex, Karen; Van Haesendonck, Chris (2002) -
Ni silicide morphology on small features
Chamirian, Oxana; Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; de Potter de ten Broeck, Muriel; Vrancken, Christa; Lindsay, Richard; Maex, Karen (2004) -
Ni- and Co-based silicides for advanced CMOS applications
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Van Dal, Mark; Akheyar, Amal; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen (2003) -
Ni-based silicides for 45 nm CMOS and beyond
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; de Potter de ten Broeck, Muriel; Lindsay, Richard; Raymakers, Toon; Pagès, Xavier; Mebarki, Bencherki; Mandrekar, Tushar; Maex, Karen (2004) -
Ni-based silicides: material issues for advanced CMOS applications
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Van Dal, Mark; Akheyar, Amal; Richard, Olivier; Lisoni, Judit; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen (2003) -
Reaction of Ni and Si0.8Ge0.2: phase formation and thermal stability
Chamirian, Oxana; Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen (2004-11) -
Sidewall grooving on CoSi2 narrow lines
Chamirian, Oxana; de Potter de ten Broeck, Muriel; Lauwers, Anne; Richard, Olivier; Lindsay, Richard; Vrancken, Christa; Maex, Karen (2003) -
Silicide scaling: Co, Ni or CoNi ?
Lauwers, Anne; Kittl, Jorge; Akheyar, Amal; Van Dal, Mark; Chamirian, Oxana; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen (2003) -
Silicides - Recent advances and prospects
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Kmieciak, Malgorzata; Van Dal, Mark; Veloso, Anabela; Kottantharayil, Anil; Pourtois, Geoffrey; de Potter de ten Broeck, Muriel; Maex, Karen (2005) -
Silicides for 65nm CMOS and beyond
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Van Dal, Mark; Akheyar, Amal; Richard, Olivier; Lisoni, Judit; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen (2003) -
Silicides for advanced CMOS devices
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; Torregiani, Cristina; Liu, J.; Benedetti, Alessandro; Richard, Olivier; Bender, Hugo; van Berkum, J.G.M.; Kaiser, M.; Veloso, Anabela; Kottantharayil, Anil; de Potter de ten Broeck, Muriel; Maex, Karen (2005) -
Silicides for sub-40nm gate length CMOS
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Van Dal, Mark; Akheyar, Amal; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen (2003)