Browsing by author "Du Bois, Bert"

1/f noise in fully integrated electrolytically gated FinFETs with fin width down to 20nm

Martens, Koen; Du Bois, Bert; Van Roy, Wim; Severi, Simone; Siew, Yong Kong; Gupta, Anshul; Dupuy, Emmanuel; Radisic, Dunja; Altamirano Sanchez, Efrain; Simoen, Eddy (2019)

50 nm Gate Length FinFET Biosensor & the Outlook for Single-Molecule Detection

Santermans, Sybren; Barge, David; Hellings, Geert; Bergfeld Mori, Carlos; Migacz, Konrad Joseph; Rip, Jens; Spampinato, Valentina; Vos, Rita; Du Bois, Bert; Ray Chaudhuri, Ashesh; Martino, J. A.; Heyns, Marc; Severi, Simone; Van Roy, Wim; Martens, Koen (2020)

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Scheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmueller, S.; Arias, A.; Ceballos, J.; Lagos, M.A.; Mora, J.-M.; Munoz, J.M.; Ragel, A.; Ramos, J.; Van Aerde, Steven; Spengler, J.; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Witvrouw, Ann (2007-01)

A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Witvrouw, Ann; Du Bois, Bert; De Moor, Piet; Verbist, Agnes; Van Hoof, Chris; Bender, Hugo; Baert, Kris (2000)

A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Stoffels, Steve; Bryce, George; Van Hoof, Rita; Du Bois, Bert; Mertens, Robert; Puers, Bob; Tilmans, Harrie; Witvrouw, Ann (2008)

A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Stoffels, Steve; Bryce, George; Van Hoof, Rita; Du Bois, Bert; Mertens, Robert; Puers, Bob; Tilmans, Harrie; Witvrouw, Ann (2009)

Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers

Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011)

Anisotropic vapor HF etching of silicon dioxide for Si microstructure release

Passi, Vikram; Sodervall, Ulf; Nilsson, Bengt; Petersson, Bengt; Hagberg, Mats; Krzeminski, Christophe; Dubois, Emmanuel; Du Bois, Bert; Raskin, Jean-Pierre (2012)

Apparent and steady-state etch rates in thin film etching and underetching of microstructures. II: Characterisation

Van Barel, Gregory; Du Bois, Bert; Van Hoof, Rita; De Wachter, Jef; De Ceuninck, Ward; Witvrouw, Ann (2010)

BioFET technology: aggressively scaled pMOS FinFET as biosensor

Martens, Koen; Santermans, Sybren; Gupta, Mihir; Hellings, Geert; Wuytens, Robin; Du Bois, Bert; Dupuy, Emmanuel; Altamirano Sanchez, Efrain; Jans, Karolien; Vos, Rita; Stakenborg, Tim; Lagae, Liesbet; Heyns, Marc; Severi, Simone; Van Roy, Wim (2019)

BioFETs and Nanopore FETs: Nanoscale Silicon Field-Effect Transistors for Single-Molecule Sensing

Martens, Koen; Barge, David; Liu, Lijun; Santermans, Sybren; Delport, Jaco; Willems, Kherim; Gevers, Juliette; Du Bois, Bert; Andrei, Alexandru; Lagae, Liesbet; Verhulst, Anne; Ray Chaudhuri, Ashesh; Severi, Simone; Marion, Sanjin; Van Dorpe, Pol (2023-05-31)

Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength

Neutens, Pieter; Subramanian, Ananth; Mahmud Ul Hasan, Hasan MD; Chen, Chang; Jansen, Roelof; Claes, Tom; Rottenberg, Xavier; Du Bois, Bert; Leyssens, Kenny; Helin, Philippe; Severi, Simone; Dhakal, Ashim; Peyskens, Frederic; Lagae, Liesbet; Deshpande, Paru; Baets, Roel; Van Dorpe, Pol (2014)

Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS

Hellin Rico, Raquel; Du Bois, Bert; Celis, Jean-Pierre; Witvrouw, Ann (2004)

CMOS-integrated MEMS and photonic sensors for application in pico-satellites

Rottenberg, Xavier; Rochus, Veronique; Jansen, Roelof; Ray Chaudhuri, Ashesh; Helin, Philippe; Severi, Simone; Du Bois, Bert; Brondani Torri, Guilherme; Claes, Tom; Neutens, Pieter; Van Dorpe, Pol; Lambrechts, Andy; Soussan, Philippe; Deshpande, Paru; Donnay, Stephane; De Moor, Piet; Tilmans, Harrie (2014)

CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device

Severi, Simone; Heck, J.; Chou, T.K.A.; Belov, N.; Park, J.S.; Harrar, D.; Jain, A.; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; Varela Pedreira, Olalla; Willegems, Myriam; Vaes, Jan; Jamieson, Geraldine; Haspeslagh, Luc; Adams, D.; Rao, V.; Decoutere, Stefaan; Witvrouw, Ann (2009)

Compact optomechanical phase shifter for visible light integrated photonics

Figeys, Bruno; Van Hoof, Rita; Neutens, Pieter; Du Bois, Bert; Brondani Torri, Guilherme; Severi, Simone; Rottenberg, Xavier (2018-05)

Development of a CMOS compatible biophotonics platform based on SiN nanophotonic waveguides

Neutens, Pieter; Claes, Tom; Jansen, Roelof; Subramanian, Ananth; Mahmud Ul Hasan, Hasan MD; Rochus, Veronique; James Shirley, Finub; Du Bois, Bert; Helin, Philippe; Severi, Simone; Leyssens, Kenny; Dhakal, Ashim; Peyskens, Frederic; Selvaraja, Shankar; Deshpande, Paru; Baets, Roel; Lagae, Liesbet; Rottenberg, Xavier; Van Dorpe, Pol (2014)

Fabrication and characterization of a highly doped poly-SiGe NEMS ohmic switches

Ramezani, Maliheh; Severi, Simone; Du Bois, Bert; Asafa, Tesleem; Rottenberg, Xavier; Rochus, Veronique; Tilmans, Harrie; De Meyer, Kristin; Witvrouw, Ann (2013)

Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid

Hellin Rico, Raquel; Du Bois, Bert; Witvrouw, Ann; Van Hoof, Chris; Celis, Jean-Pierre (2007)

Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe

Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Verbist, Agnes; Witvrouw, Ann (2007-03)