Browsing by author "Pierreux, Dieter"

Now showing items 1-20 of 20

    • Alternative high-k dielectrics for semiconductor applications 

      Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; Van Bael, Marlies; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2009)

    • Atomic layer deposition of gadolinium aluminate layers using Gd(iPrCp)3, TMA, and O3 or H2O 

      Adelmann, Christoph; Pierreux, Dieter; Swerts, Johan; Dewulf, Daan; Hardy, An; Tielens, Hilde; Franquet, Alexis; Brijs, Bert; Moussa, Alain; Conard, Thierry; Van Bael, Marlies; Maes, Jan; Jurczak, Gosia; Kittl, Jorge; Van Elshocht, Sven (2010)

    • Atomic layer deposition of Gd-doped HfO2 thin films 

      Adelmann, Christoph; Tielens, Hilde; Dewulf, Daan; Hardy, An; Pierreux, Dieter; Swerts, Johan; Rosseel, Erik; Shi, Xiaoping; Van Bael, Marlies; Kittl, Jorge; Van Elshocht, Sven (2010)

    • Atomic layer deposition of GdAlOx and GdHfOx using Gd(iPr-Cp)3 

      Adelmann, Christoph; Pierreux, Dieter; Swerts, Johan; Kesters, Jurgen; Richard, Olivier; Conard, Thierry; Franquet, Alexis; Tielens, Hilde; Afanasiev, Valeri; Schaekers, Marc; Van Elshocht, Sven (2009)

    • Atomic layer deposition of GdHfOx thin films 

      Adelmann, Christoph; Pierreux, Dieter; Swerts, Johan; Rosseel, Erik; Shi, Xiaoping; Tielens, Hilde; Kesters, Jurgen; Van Elshocht, Sven; Kittl, Jorge (2009)

    • Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4 

      Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Brijs, Bert; Conard, Thierry; Opsomer, Karl; Maes, Jan; Wouters, Dirk; Kittl, Jorge (2010)

    • Band edge work function metal gates using PEALD TaCN electrodes 

      Maes, Jan; Swerts, Johan; Pierreux, Dieter; Machkaoutsan, Vladimir; Marcus, Steven; Milligan, Brennan; Schram, Tom; Ragnarsson, Lars-Ake; Cacciato, Antonio; Rohr, Erika; Rothschild, Aude; Hendrickx, Paul; Breuil, Laurent; Van den Bosch, Geert (2009)

    • Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes 

      Menou, Nicolas; Popovici, Mihaela Ioana; Clima, Sergiu; Opsomer, Karl; Polspoel, Wouter; Kaczer, Ben; Rampelberg, Geert; Tomida, Kazuyuki; Pawlak, Malgorzata; Detavernier, Christophe; Pierreux, Dieter; Swerts, Johan; Maes, Jan Willem; Manger, Dirk; Badylevich, M; Afanasiev, Valeri; Conard, Thierry; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Pourtois, Geoffrey; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2009)

    • Extending gate dielectric scaling by using ALD HfO2/SrTiO3 stacks 

      Maes, Jan; Machkaoutsan, Vladimir; Pierreux, Dieter; Blomberg, Tom; Swerts, Johan; Schram, Tom; Adelmann, Christoph; Delabie, Annelies; Van Elshocht, Sven; Popovici, Mihaela Ioana; Conard, Thierry; Tseng, Joshua; Ragnarsson, Lars-Ake (2010)

    • Extreme scaled gate dielectrics by using ALD Hf-based composite materials 

      Pierreux, Dieter; Machkaoutsan, Vladimir; Tois, E.; Swerts, Johan; Schram, Tom; Adelmann, Christoph; Van Elshocht, Sven; Tseng, Joshua; Ragnarsson, Lars-Ake; Maes, Jan (2009)

    • Extreme scaled gate dielectrics by using ALD HfO2/SrTiO3 composite structures 

      Pierreux, Dieter; Machkaoutsan, Vladimir; Tois, E.; Swerts, Johan; Schram, Tom; Adelmann, Christoph; Van Elshocht, Sven; Popovici, Mihaela Ioana; Conard, Thierry; Tseng, Joshua; Ragnarsson, Lars-Ake; Maes, Jan (2009)

    • Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4 

      Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Opsomer, Karl; Brijs, Bert; Faelens, Gerrit; Franquet, Alexis; Conard, Thierry; Maes, Jan Willem; Wouters, Dirk; Kittl, Jorge Adrian (2009)

    • High-k dielectrics and metal gates for future generation memory devices 

      Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Detavernier, C.; Knaepen, W.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009)

    • High-k dielectrics and metal gates for future generation memory devices 

      Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, P.; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009)

    • High-k dielectrics for future generation memory devices 

      Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, Wouter; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, Pamela; Maes, Jan; Manger, Dirk; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009)

    • Implementation of rare earth elements in high-k based gate stacks 

      Van Elshocht, Sven; Adelmann, Christoph; Nyns, Laura; Delabie, Annelies; Popovici, Mihaela Ioana; Swerts, Johan; Meersschaut, Johan; Shi, Xiaoping; Gielis, Sven; Kesters, Jurgen; Breuil, Laurent; Ragnarsson, Lars-Ake; Schram, Tom; Pourtois, Geoffrey; Pierreux, Dieter; Maes, Jan; Jurczak, Gosia; Kittl, Jorge (2009)

    • On the process and material sensitivities for high-k based dielectrics 

      Van Elshocht, Sven; Adelmann, Christoph; Popovici, Mihaela Ioana; Swerts, Johan; Delabie, Annelies; Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Pourtois, Geoffrey; Menou, Nicolas; Breuil, Laurent; Pierreux, Dieter; Maes, Jan; Hardy, An; Van Bael, Marlies; Jurczak, Gosia; Kittl, Jorge (2010)

    • Rare earth materials for semiconductor applications 

      Van Elshocht, Sven; Adelmann, Christoph; Popovici, Mihaela Ioana; Swerts, Johan; Delabie, Annelies; Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Pourtois, Geoffrey; Schram, Tom; Pierreux, Dieter; Maes, Jan; Hardy, An; Van Bael, Marlies; Kittl, Jorge (2010)

    • Rare earth materials for semiconductor applications 

      Van Elshocht, Sven; Adelmann, Christoph; Popovici, Mihaela Ioana; Swerts, Johan; Delabie, Annelies; Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Brijs, Bert; Pourtois, Geoffrey; Schram, Tom; Pierreux, Dieter; Maes, Jan; Hardy, An; Van Bael, Marlies; Kittl, Jorge (2010)

    • Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response 

      Clima, Sergiu; Pourtois, Geoffrey; Menou, Nicolas; Popovici, Mihaela Ioana; Rothschild, Aude; Kaczer, Ben; Van Elshocht, Sven; Wang, Xin Peng; Swerts, Johan; Pierreux, Dieter; De Gendt, Stefan; Wouters, Dirk; Kittl, Jorge (2009)