Browsing by author "Balboni, R."
Now showing items 1-12 of 12
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Analysis of depth-inhomogeneous strains in deep sub-micron silicon devices by TEM/CBED
Spessot, A.; Armigliato, A.; Balboni, R.; Frabboni, S.; Benedetti, Alessandro (2005) -
Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures
Armigliato, A.; Balboni, R.; Corticelli, F.; Frabboni, S.; Malvezzi, F.; Vanhellemont, Jan (1994) -
Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures
Armigliato, A.; Balboni, R.; Corticelli, F.; Malvezzi, F.; Vanhellemont, Jan (1995) -
Electron microscopy techniques for the assessment of localised stress distributions in semiconductors
Vanhellemont, Jan; Janssens, Koenraad; Frabboni, S.; Balboni, R.; Armigliato, A. (1995) -
On the spatial resolution in analytical electron microscopy
Armigliato, A.; Howard, Dave; Balboni, R.; Frabboni, S.; Caymax, Matty (1998) -
On the TEM assessment of local strain distributions in integrated circuit structures
Vanhellemont, Jan; Armigliato, A.; Frabboni, S.; Balboni, R.; Janssens, Koenraad (1994) -
Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
Senez, V.; Armigliato, A.; De Wolf, Ingrid; Carnevale, G.; Balboni, R.; Frabboni, S.; Benedetti, Alessandro (2003) -
Strain measurements in thin film structures by convergent beam electron diffraction
Armigliato, A.; Balboni, R.; Benedetti, A.; Frabboni, S.; Tixier, A.; Vanhellemont, Jan (1996) -
Strain measurements in thin film structures by convergent beam electron diffraction
Armigliato, A.; Balboni, R.; Benedetti, A.; Frabboni, S.; Tixier, A.; Vanhellemont, Jan (1997) -
Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling
De Wolf, Ingrid; Senez, V; Balboni, R.; Armigliato, A.; Frabboni, S.; Cedola, A.; Lagomarsino, S. (2003) -
Transmission electron diffraction techniques for nm scale strain measurement in semiconductors
Vanhellemont, Jan; Janssens, Koenraad; Frabboni, S.; Smeys, Peter; Balboni, R.; Armigliato, A. (1996) -
Transmission electron diffraction techniques for nm scale strain measurements in semiconductors
Vanhellemont, Jan; Janssens, Koenraad; Frabboni, S.; Smeys, Peter; Balboni, R.; Armigliato, A. (1996)