Browsing by author "Vellianitis, Georgios"
Now showing items 1-11 of 11
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Application of HCl etch in the production of novel devices
Hikavyy, Andriy; Rooyackers, Rita; Verheyen, Peter; Vellianitis, Georgios; Van Dal, Mark; Lander, Rob; Loo, Roger; Caymax, Matty (2008) -
Application of HCl gas phase etch in the production of novel devices
Hikavyy, Andriy; Rooyackers, Rita; Verheyen, Peter; Leys, Frederik; Vellianitis, Georgios; Van Dal, Mark; Lander, Rob; Loo, Roger (2008-05) -
Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications
Veloso, Anabela; Van Dal, Mark; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Redolfi, Augusto; Brus, Stephan; Duffy, Ray; Pawlak, Bartek; Vellianitis, Georgios; Duriez, Blandine; Merelle, Thomas; Absil, Philippe; Biesemans, Serge; Jurczak, Gosia; Hoffmann, Thomas Y.; Lander, Rob (2009-10) -
Experimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETs
Serra, N.; Conzatti, F.; Esseni, D.; De Michielis, M.; Palestri, P.; Selmi, L.; Thomas, S.; Whall, T. E.; Parker, E. H. C.; Leadley, D. R.; Witters, Liesbeth; Hikavyy, Andriy; Hytch, M. J.; Houdellier, F.; Snoeck, E.; Wang, T. J.; Lee, W. C.; Vellianitis, Georgios; Van Dal, Mark; Duriez, Blandine; Doornbos, Gerben; Lander, Rob (2009) -
First observation of FinFET specific mismatch behavior and optimization guidelines for SRAM scaling
Merelle, Thomas; Curatola, Gilberto; Nackaerts, Axel; Collaert, Nadine; Van Dal, Mark; Doornbos, Gerben; Doorn, T.S.; Christie, Phillip; Vellianitis, Georgios; Duriez, Blandine; Duffy, Ray; Pawlak, Bartek; Voogt, F.C.; Rooyackers, Rita; Witters, Liesbeth; Jurczak, Gosia; Lander, Rob (2008) -
Gatestacks for scalable high-performance FinFETs
Vellianitis, Georgios; Van Dal, Mark; Witters, Liesbeth; Curatola, Gilberto; Doornbos, Gerben; Collaert, Nadine; Jonville, C.; Torregiani, Cristina; Lai, Li-Shyue; Petry, Jasmine; Pawlak, Bartek; Duffy, Ray; Demand, Marc; Beckx, Stephan; Mertens, Sofie; Delabie, Annelies; Vandeweyer, Tom; Delvaux, Christie; Leys, Frederik; Hikavyy, Andriy; Rooyackers, Rita; Kaiser, M.; Weemaes, R.G.R.; Voogt, F.; Roberts, H.; Donnet, D.; Biesemans, Serge; Jurczak, Gosia; Lander, Rob (2007) -
High performance Si.45Ge.55 implant free quantum well FET featuring low temperature process, eSiGe stressor and transversal strain relaxation
Yamaguchi, Shinpei; Witters, Liesbeth; Mitard, Jerome; Eneman, Geert; Hellings, Geert; Fukuda, Masahiro; Hikavyy, Andriy; Loo, Roger; Veloso, Anabela; Crabbe, Yvo; Rohr, Erika; Favia, Paola; Bender, Hugo; Takeoka, S.; Vellianitis, Georgios; Wang, Wei-E; Ragnarsson, Lars-Ake; De Meyer, Kristin; Steegen, An; Horiguchi, Naoto (2011) -
Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography
Van Dal, Mark; Collaert, Nadine; Doornbos, Gerben; Vellianitis, Georgios; Curatola, Gilberto; Pawlak, Bartek; Duffy, Ray; Jonville, Carole; Degroote, Bart; Altamirano Sanchez, Efrain; Kunnen, Eddy; Demand, Marc; Beckx, Stephan; Vandeweyer, Tom; Delvaux, Christie; Leys, Frederik; Hikavyy, Andriy; Rooyackers, Rita; Kaiser, M.; Weemaes, R.G.R.; Biesemans, Serge; Jurczak, Gosia; Kottantharayil, Anil; Witters, Liesbeth; Lander, Rob (2007) -
Material aspects and challenges for SOI FinFET integration
Van Dal, Mark; Vellianitis, Georgios; Duffy, Ray; Doornbos, Gerben; Pawlak, Bartek; Duriez, Blandine; Lai, Li-Shyue; Hikavyy, Andriy; Vandeweyer, Tom; Demand, Marc; Altamirano Sanchez, Efrain; Rooyackers, Rita; Witters, Liesbeth; Collaert, Nadine; Jurczak, Gosia; Kaiser, M.; Weemaes, R. G. R.; Lander, Rob (2008) -
Material aspects and challenges for SOI FinFET integration
Van Dal, Mark; Vellianitis, Georgios; Duffy, Ray; Pawlak, Bartek; Lai, Li-Shyue; Hikavyy, Andriy; Collaert, Nadine; Jurczak, Gosia; Lander, Rob (2008) -
The influence of TiN thickness and SiO2 formation method on the structural and electrical properties of TiN/HfO2/SiO2 gate stacks
Vellianitis, Georgios; Van Dal, Mark; Boccardi, Guillaume; Duriez, Blandine; Voogt, Frans; Kaiser, Monja; Witters, Liesbeth; Lander, Rob (2009)