Browsing by author "Mody, Jay"
Now showing items 1-20 of 45
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3D-carrier profiling in FinFETs using scanning spreading resistance microscopy
Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; De Keersgieter, An; Eneman, Geert; Kambham, Ajay Kumar; Drijbooms, Chris; Schulze, Andreas; Chiarella, Thomas; Horiguchi, Naoto; Hoffmann, Thomas; Eyben, Pierre; Vandervorst, Wilfried (2011) -
3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Vandervorst, Wilfried; Schulze, Andreas; Eyben, Pierre; Zschaetzsch, Gerd; Koelling, Sebastian; Kumar, Arul; Mody, Jay; Gilbert, Matthieu (2011) -
Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopy
Mody, Jay; Eyben, Pierre; Polspoel, Wouter; Schulze, Andreas; Nazir, Aftab; Vandervorst, Wilfried (2008) -
AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale
Schulze, Andreas; Hantschel, Thomas; Eyben, Pierre; Verhulst, Anne; Rooyackers, Rita; Vandooren, Anne; Mody, Jay; Vandervorst, Wilfried (2013) -
Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Eyben, Pierre; Clemente, Francesca; Vanstreels, Kris; Pourtois, Geoffrey; Sankaran, Kiroubanand; Clarysse, Trudo; Mody, Jay; Duriau, Edouard; Hantschel, Thomas; Vandervorst, Wilfried; Mylvaganam, Kausala; Zhang, Liangchi (2010) -
Analysis and modeling of the HV-SSRM nanocontact on silicon
Eyben, Pierre; Clemente, Francesca; Vanstreels, Kris; Pourtois, Geoffrey; Sankaran, Kiroubanand; Clarysse, Trudo; Mody, Jay; Duriau, Edouard; Hantschel, Thomas; Vandervorst, Wilfried; Mylvaganam, Kausala; Zhang, Liangchi (2009) -
Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H. (2007) -
Atom probe for FinFET dopant characterization
Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Koelling, Sebastian; Vandervorst, Wilfried (2010) -
Conformal doping for FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay; Jurczak, Gosia; Nguyen, Duy; Takeuchi, Shotaro; Leys, Frederik; Loo, Roger; Caymax, Matty; Everaert, Jean-Luc (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008) -
Development and optimization of FIB-based sample preparation for SSRM
Eyben, Pierre; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Hantschel, Thomas; Vandervorst, Wilfried (2010) -
Dopant and carrier profiling for 3D-device architectures
Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Eyben, Pierre; Gilbert, Matthieu; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2011) -
Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution
Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Schatzer, Philipp; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Jurczak, Gosia; Horiguchi, Naoto; Gilbert, Matthieu; Eyben, Pierre; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2010) -
Dopant and carrier profiling in FinFET-based structures
Mody, Jay (2013-08) -
Dopant/carrier profiling for 3D-structures
Vandervorst, Wilfried; Schulze, Andreas; Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Eyben, Pierre (2014) -
Dopant/carrier profiling in nanostructures
Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Mody, Jay; Koelling, Sebastian; Kambham, Ajay Kumar; Gilbert, Matthieu (2010) -
Electrical characterization of carbon nanotube based interconnects
Schulze, Andreas; Hantschel, Thomas; Eyben, Pierre; Dathe, Andre; Nazir, Aftab; Mody, Jay; Celano, Umberto; Ke, Xiaoxing; Vandervorst, Wilfried (2011) -
Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification
Mylvaganam, Kausala; Zhang, Liangchi; Eyben, Pierre; Mody, Jay; Vandervorst, Wilfried (2009) -
Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, R. G. R.; Vandervorst, Wilfried (2010)