Browsing by author "Paraschiv, Vasile"
Now showing items 21-40 of 127
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Effective metal gate work function modification by ion implantation with W-based gate stack
Li, Zilan; Schram, Tom; Kerner, Christoph; Witters, Thomas; Singanamalla, Raghunath; Pourtois, Geoffrey; Paraschiv, Vasile; Hoffmann, Thomas Y.; Rohr, Erika; Absil, Philippe; De Gendt, Stefan; De Meyer, Kristin (2008) -
Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology
Wouters, Dirk; Goux, Ludovic; Lisoni, Judit; Maes, David; Vander Meeren, Hans; Paraschiv, Vasile; Haspeslagh, Luc; Artoni, Cesari; Corallo, Giuseppina; Zambrano, Raffaele (2005) -
Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Paraschiv, Vasile; Maes, David; Vander Meeren, Hans; Willegems, Myriam; Haspeslagh, Luc; Wouters, Dirk; Caputa, C.; Zambrano, R.; Turquat, Ch.; Muller, Ch. (2007-01) -
Etch development for E-mode GaN power HEMT fabrication
Mannaert, Geert; Posthuma, Niels; De Jaeger, Brice; Van Hove, Marleen; Xu, Kaidong; Decoutere, Stefaan; Paraschiv, Vasile (2014) -
Etch of Yb-doped poly gates to achieve low vt Ni-FUSI CMOS
Demand, Marc; Paraschiv, Vasile; Shamiryan, Denis; Veloso, Anabela; Vrancken, Christa; Brus, Stephan; Boullart, Werner (2007) -
Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure
Goux, Ludovic; Russo, G.; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R. (2005) -
Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices
Seema Saseendran, Sandeep; Paneri, Abhilash; Tobback, Bert; Kutrzeba Kotowska, Bogumila; Vecchio, Emma; Jamieson, Geraldine; Paraschiv, Vasile; Figeys, Bruno; Suh, Hyo Seon; Sabuncuoglu Tezcan, Deniz; Takahashi, Kohei; Fujikane, Masaki; Himeno, Atsushi; Nakamura, Kunihiko; Tambo, Naoki; Nakata, Yuki; Tanaka, Hiroyuki; Naito, Yasuyuki (2020) -
FEOL etch challenges, from planar metal gates towards FinFET devices
Altamirano Sanchez, Efrain; Paraschiv, Vasile; Boullart, Werner (2012) -
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Goux, Ludovic; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Zhen, X.; Kaczer, Ben; Haspeslagh, Luc; Wouters, Dirk; Muller, C.; Caputa, C.; Zambrano, R. (2004) -
Fully CMOS BEOL compatible HfO2 RRAM cell, with low (μA) program current, strong retention and high scalability, using an optimized Plasma Enhanced Atomic Layer Deposition (PEALD) process for TiN electrode
Chen, Yangyin; Goux, Ludovic; Pantisano, Luigi; Swerts, Johan; Adelmann, Christoph; Mertens, Sofie; Afanasiev, Valeri; Wang, Xin Peng; Govoreanu, Bogdan; Degraeve, Robin; Kubicek, Stefan; Paraschiv, Vasile; Verbrugge, Beatrijs; Jossart, Nico; Altimime, Laith; Jurczak, Gosia; Kittl, Jorge; Groeseneken, Guido; Wouters, Dirk (2011) -
Functional group transfer from gold nanoparticles to flat gold surfaces for the creation of molecular anchoring point on surfaces
Paraschiv, Vasile; Zapotoczny, S.; de Jong, M.R.; Vancso, G.J.; Huskens, J.; Reinhoudt, D.N. (2002) -
Galvanic corrosion of stacked metal gate electrodes during cleaning in HF solutions
Garaud, Sylvain; Vos, Rita; Shamiryan, Denis; Paraschiv, Vasile; Mertens, Paul; Fransaer, Jan; De Gendt, Stefan (2008) -
Gate double patterning strategies for 10nm node FinFET devices
Hody, Hubert; Paraschiv, Vasile; Hellin, David; Vandeweyer, Tom; Boccardi, Guillaume; Xu, Kaidong (2014) -
Gate-all-around NWFETs vs. triple-gate FinFETs: junctionless vs. extensionless and conventional junction devices with controlled EWF modulation for multi-VT CMOS
Veloso, Anabela; Hellings, Geert; Cho, Moon Ju; Simoen, Eddy; Devriendt, Katia; Paraschiv, Vasile; Vecchio, Emma; Tao, Zheng; Versluijs, Janko; Souriau, Laurent; Dekkers, Harold; Brus, Stephan; Geypen, Jef; Lagrain, Pieter; Bender, Hugo; Eneman, Geert; Matagne, Philippe; De Keersgieter, An; Fang, W.; Collaert, Nadine; Thean, Aaron (2015) -
Gate-last vs. gate-first technology for aggressively scaled EOT Logic/RF CMOS
Veloso, Anabela; Ragnarsson, Lars-Ake; Cho, Moon Ju; Devriendt, Katia; Kellens, Kristof; Sebaai, Farid; Suhard, Samuel; Brus, Stephan; Crabbe, Yvo; Schram, Tom; Rohr, Erika; Paraschiv, Vasile; Eneman, Geert; Kauerauf, Thomas; Dehan, Morin; Hong, Sug-Hun; Yamaguchi, Shinpei; Takeoka, Shinji; Higuchi, Yuichi; Tielens, Hilde; Van Ammel, Annemie; Favia, Paola; Bender, Hugo; Franquet, Alexis; Conard, Thierry; Li, X.; Pey, K.-L.; Struyf, Herbert; Mertens, Paul; Absil, Philippe; Horiguchi, Naoto; Hoffmann, Thomas Y. (2011) -
Growth of copper and copper compound nanowires
Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Boullart, Werner; De Gendt, Stefan; Baklanov, Mikhaïl; Vinckier, Chris; Vanhaelemeersch, Serge (2008) -
HF based solutions for HfO2 removal. Effect of pH and temperature on HfO2:SiO2 etch selectivity
Paraschiv, Vasile; Claes, Martine; Baklanov, Mikhaïl; Boullart, Werner; De Gendt, Stefan; Vanhaelemeersch, Serge (2004) -
HF based solutions for HfO2 removal. Effect of pH and temperature on HfO2:SiO2 etch selectivity
Paraschiv, Vasile; Claes, Martine; Baklanov, Mikhaïl; Boullart, Werner; De Gendt, Stefan; Vanhaelemeersch, Serge (2005) -
High performance oxide diode
Radu, Iuliana; Govoreanu, Bogdan; Ikram, Rafay; Peter, Antony; Martens, Koen; Hody, Hubert; Kim, Woosik; Toeller, Michael; Paraschiv, Vasile; Favia, Paola; Clima, Sergiu; De Gendt, Stefan; Heyns, Marc; Stesmans, Andre; Jurczak, Gosia (2013) -
High-drive current (>1MA/cm2), highly nonlinear (>103) TiN/amorphous-silicon/TiN scalable bidirectional selector with excellent reliability and its variability impact on the 1S1R array performance
Zhang, Leqi; Redolfi, Augusto; Crotti, Davide; Adelmann, Christoph; Clima, Sergiu; Chen, Yangyin; Opsomer, Karl; Subhechha, Subhali; Wouters, Dirk; Groeseneken, Guido; Jurczak, Gosia; Govoreanu, Bogdan; Cosemans, Stefan; Richard, Olivier; Bender, Hugo; Hendrickx, Paul; Witters, Thomas; Hody, Hubert; Paraschiv, Vasile; Radu, Iuliana (2014)