Browsing by author "Kittl, Jorge"
Now showing items 21-40 of 194
-
Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4
Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Brijs, Bert; Conard, Thierry; Opsomer, Karl; Maes, Jan; Wouters, Dirk; Kittl, Jorge (2010) -
Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films
Opsomer, Karl; Schaekers, Marc; Rampelberg, G.; Deduytsche, D.; Detavernier, C.; Kittl, Jorge (2009) -
Atomic-layer deposition of lutetium aluminate thin films for non-volatile memory applications
Adelmann, Christoph; Swerts, Johan; Conard, Thierry; Brijs, Bert; Franquet, Alexis; Hardy, An; Tielens, Hilde; Opsomer, Karl; Moussa, Alain; Van Bael, Marlies; Jurczak, Gosia; Kittl, Jorge; Van Elshocht, Sven (2011) -
Balancing SET/RESET pulse for >1010 endurance in HfO2 / Hf 1T1R bipolar RRAM
Chen, Yangyin; Govoreanu, Bogdan; Goux, Ludovic; Degraeve, Robin; Fantini, Andrea; Kar, Gouri Sankar; Wouters, Dirk; Groeseneken, Guido; Kittl, Jorge; Jurczak, Gosia; Altimime, Laith (2012) -
Band alignment and electron traps in Y2O3 layers on (100) Si
Wang, Wan Chih; Badylevitch, M.; Afanasiev, Valeri; Stesmans, Andre; Adelmann, Christoph; Van Elshocht, Sven; Kittl, Jorge; Lukosius, M.; Walczyk, Ch.; Wenger, Ch. (2009) -
Characterization of Al/Ti and NiGe ohmic contacts to n-type GeSn CVD-grown layers
Firrincieli, Andrea; Gupta, Suyog; Vincent, Benjamin; Gencarelli, Federica; Lin, Dennis; Simoen, Eddy; Vandervorst, Wilfried; Claeys, Cor; Saraswat, K.; Kittl, Jorge (2012) -
Charge characterisation in metal-gate/high-k layers: Effect of post-deposition annealing and gate electrode
O'Sullivan, Barry; Pourtois, Geoffrey; Kaushik, Vidya; Schram, Tom; Kittl, Jorge; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc (2007-07) -
Chemical and electrical dopant evolution during solid phase epitaxial regrowth
Pawlak, Bartek; Lindsay, Richard; Vandervorst, Wilfried; Kittl, Jorge; Surdeanu, Radu; Duffy, Ray; Stolk, P. (2003) -
Chemical and electrical dopant profiling for P-type junctions formed by solid phase epitaxial regrowth
Pawlak, Bartek; Lindsay, Richard; Kittl, Jorge; Vandervorst, Wilfried; Clarysse, Trudo; Hoflijk, Ilse; Dieu, B.; Geenen, Luc; Brijs, Bert (2003) -
CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
Lauwers, Anne; Veloso, Anabela; Hoffmann, Thomas Y.; Van Dal, Mark; Vrancken, Christa; Brus, Stephan; Locorotondo, Sabrina; de Marneffe, Jean-Francois; Sijmus, Bram; Kubicek, Stefan; Chiarella, Thomas; Kmieciak, Malgorzata; Opsomer, Karl; Niwa, Masaaki; Mitsuhashi, Riichirou; Kottantharayil, Anil; Yu, HongYu; Demeurisse, Caroline; Verbeeck, Rita; de Potter de ten Broeck, Muriel; Absil, Philippe; Maex, Karen; Jurczak, Gosia; Biesemans, Serge; Kittl, Jorge (2005-12) -
CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach
Kottantharayil, Anil; Verheyen, Peter; Collaert, Nadine; Dixit, Abhisek; Kaczer, Ben; Snow, Jim; Vos, Rita; Locorotondo, Sabrina; Degroote, Bart; Shi, Xiaoping; Rooyackers, Rita; Mannaert, Geert; Brus, Stephan; Yim, Yong Sik; Lauwers, Anne; Goodwin, Michael; Kittl, Jorge; Van Dal, Mark; Richard, Olivier; Veloso, Anabela; Kubicek, Stefan; Beckx, Stephan; Boullart, Werner; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
Akheyar, Amal; Lauwers, Anne; Kittl, Jorge; de Potter de ten Broeck, Muriel; Chamirian, Oxana; Jonckheere, Rik; Leunissen, Peter; Van Dal, Mark; Lindsay, Richard; Tempel, Georg; Maex, Karen (2003) -
Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
Menou, Nicolas; Popovici, Mihaela Ioana; Clima, Sergiu; Opsomer, Karl; Polspoel, Wouter; Kaczer, Ben; Rampelberg, Geert; Tomida, Kazuyuki; Pawlak, Malgorzata; Detavernier, Christophe; Pierreux, Dieter; Swerts, Johan; Maes, Jan Willem; Manger, Dirk; Badylevich, M; Afanasiev, Valeri; Conard, Thierry; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Pourtois, Geoffrey; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2009) -
Compositional depth profiling of TaCN thin films
Adelmann, Christoph; Conard, Thierry; Franquet, Alexis; Brijs, Bert; Munnik, Frans; Burgess, Simon; Witters, Thomas; Meersschaut, Johan; Kittl, Jorge; Vandervorst, Wilfried; Van Elshocht, Sven (2012) -
Compositional study of BaSrTiO thin films for memory application
Tomida, Kazuyuki; Opsomer, Karl; Vrancken, Christa; Matero, Raija; Tois, Eva; Kaczer, Ben; Pawlak, Malgorzata; Popovici, Mihaela Ioana; Swerts, Johan; Van Elshocht, Sven; Detavernier, Christophe; Kim, Min-Soo; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers
Manger, Dirk; Kaczer, Ben; Menou, Nicolas; Clima, Sergiu; Wouters, Dirk; Afanasiev, Valeri; Kittl, Jorge (2009) -
Conductive bridge random access memory technology
Kittl, Jorge; Altimime, Laith (2010) -
Contact resistivity and Fermi-level pinning in n-type Ge contacts with epitaxial Si-passivation
Martens, Koen; Rooyackers, Rita; Firrincieli, Andrea; Vincent, Benjamin; Loo, Roger; De Jaeger, Brice; Meuris, Marc; Favia, Paola; Bender, Hugo; Douhard, Bastien; Vandervorst, Wilfried; Simoen, Eddy; Jurczak, Gosia; Wouters, Dirk; Kittl, Jorge (2011) -
Contact technology schemes for advanced Ge and III-V CMOS technologies
Claeys, Cor; Firrincieli, Andrea; Martens, Koen; Kittl, Jorge; Simoen, Eddy (2012) -
Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium
Popovici, Mihaela Ioana; Swerts, Johan; Tomida, Kazuyuki; Radisic, Dunja; Kim, Min-Soo; Kaczer, Ben; Richard, Olivier; Bender, Hugo; Delabie, Annelies; Moussa, Alain; Vrancken, Christa; Opsomer, Karl; Franquet, Alexis; Pawlak, Malgorzata; Schaekers, Marc; Altimime, Laith; Van Elshocht, Sven; Kittl, Jorge (2011)