Browsing by author "Groven, Benjamin"
Now showing items 21-40 of 56
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Epitaxial registry and crystallinity of MoS2 via molecular beam and metalorganic vapor phase van der Waals epitaxy
Mortelmans, Wouter; El Kazzi, Salim; Groven, Benjamin; Nalin Mehta, Ankit; Balaji, Yashwanth; De Gendt, Stefan; Heyns, Marc; Merckling, Clement (2020) -
Extreme scaling enabled by MX2 transistors: variability challenges (invited)
Smets, Quentin; Arutchelvan, Goutham; Schram, Tom; Verreck, Devin; Groven, Benjamin; Cott, Daire; Ahmed, Zubair; Shi, Yuanyuan; Sutar, Surajit; Nalin Mehta, Ankit; Lin, Dennis; Asselberghs, Inge; Radu, Iuliana (2021) -
Grain-boundary-induced strain and distortion in epitaxial bilayer MoS2 lattice
Nalin Mehta, Ankit; Mo, Jiongjiong; Pourtois, Geoffrey; Dabral, Ashish; Groven, Benjamin; Bender, Hugo; Favia, Paola; Caymax, Matty; Vandervorst, Wilfried (2020) -
High yield and process uniformity for 300 mm integrated WS2 FETs
Schram, Tom; Smets, Quentin; Radisic, Dunja; Groven, Benjamin; Thiam, Arame; Li, Waikin; Dupuy, Emmanuel; Vandersmissen, Kevin; Maurice, Thibaut; Asselberghs, Inge; Radu, Iuliana (2021) -
Impact of device scaling on the electrical properties of MoS2 field-effect transistors
Arutchelvan, Goutham; Smets, Quentin; Verreck, Devin; Ahmed, Zubair; Gaur, Abhinav; Sutar, Surajit; Jussot, Julien; Groven, Benjamin; Heyns, Marc; Lin, Dennis; Asselberghs, Inge; Radu, Iuliana (2021) -
Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applications
Popovici, Mihaela Ioana; Delabie, Annelies; Adelmann, Christoph; Marcoen, Kristof; Groven, Benjamin; Swerts, Johan; Meersschaut, Johan; Franquet, Alexis; Redolfi, Augusto; Jurczak, Gosia; Van Elshocht, Sven (2014) -
Increased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer deposition
Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Nuytten, Thomas; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies (2018) -
Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition
Delabie, Annelies; Tomczak, Yoann; Heyne, Markus; Groven, Benjamin; van Pelt, Thomas; Zhang, Haodong; De Gendt, Stefan; Van Elshocht, Sven; Caymax, Matty; Radu, Iuliana (2017) -
Interface admittance measurement and simulation of dual gated CVD WS2 MOSCAPs: Mapping the D-IT(E) profile
Koladi Mootheri, Vivek; Wu, Xiangyu; Cott, Daire; Groven, Benjamin; Heyns, Marc; Asselberghs, Inge; Radu, Iuliana; Lin, Dennis (2021) -
Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; De Gendt, Stefan; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Monolayer controlled deposition of 2D transition metal dichalcogenides on large area substrates
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Caymax, Matty; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Nucleation behaviour of PEALD WS2 on Al2O3 and SiO2
Groven, Benjamin; Nalin Mehta, Ankit; Meersschaut, Johan; Vanhaeren, Danielle; Bender, Hugo; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2016) -
Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Smets, Quentin; Meersschaut, Johan; Franquet, Alexis; Conard, Thierry; Nuytten, Thomas; Verdonck, Patrick; Vandervorst, Wilfried; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2018) -
Nucleation mechanisms for chemical vapor deposition and atomic layer deposition of 2D semiconductor materials
Delabie, Annelies; Zhang, Haodong; van Pelt, Thomas; Groven, Benjamin; Heyne, Markus; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2017) -
Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S
Groven, Benjamin; Caymax, Matty; Heyns, Marc; Radu, Iuliana; Delabie, Annelies (2017) -
Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport
Groven, Benjamin; Nalin Mehta, Ankit; Smets, Quentin; Schram, Tom; Bender, Hugo; Vandervorst, Wilfried; Radu, Iuliana; Caymax, Matty; Heyns, Marc; Delabie, Annelies (2017) -
Overview of scalable transfer approaches to enable epitaxial 2D material integration
Brems, Steven; Ghosh, Souvik; Smets, Quentin; Boulon, Marie-Emmanuelle; Boelen, Andries; Kennes, Koen; Tsai, Hung-Chieh; Chancerel, Francois; Merckling, Clement; Wyndaele, Pieter-Jan; de Marneffe, Jean-Francois; Schram, Tom; Kumar, Pawan; Sergeant, Stefanie; Nuytten, Thomas; De Gendt, Stefan; Medina Silva, Henry; Groven, Benjamin; Morin, Pierre; Kar, Gouri Sankar; Lockhart de la Rosa, Cesar Javier; Yudistira, Didit; Van Campenhout, Joris; Asselberghs, Inge; Phommahaxay, Alain (2023) -
Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasma
Groven, Benjamin; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Richard, Olivier; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2016) -
Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana; Delabie, Annelies; Caymax, Matty (2015) -
Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S
Groven, Benjamin; Heyne, Markus; Nalin Mehta, Ankit; Bender, Hugo; Nuytten, Thomas; Meersschaut, Johan; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2017)