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Recent advances in EUV patterning in preparation towards high-NA EUV
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Authors
Nagahara, Seiji
;
Dauendorffer, Arnaud
;
Thiam, Arame
;
Liu, Xiang
;
Kuwahara, Yuhei
;
Dinh, Cong Que
;
Okada, Soichiro
;
Kawakami, Shinichiro
;
Genjima, Hisashi
;
Nagamine, Noriaki
;
Muramatsu, Makoto
;
Shimura, Satoru
;
Tsuboi, Atsushi
;
Nafus, Kathleen
;
Feurprier, Yannick
;
Demand, Marc
;
Ramaneti, Rajesh
;
Foubert, Philippe
;
De Simone, Danilo
;
Vandenberghe, Geert
DOI
10.1117/12.2657432
EISBN
978-1-5106-6104-2
ISBN
978-1-5106-6103-5
ISSN
0277-786X
Conference
Conference on Advances in Patterning Materials and Processes XL
Journal
Proceedings of SPIE
Volume
12498
Title
Recent advances in EUV patterning in preparation towards high-NA EUV
Publication type
Proceedings paper
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2
20.500.12860/42227.2
*
2024-04-15T08:47:22Z
validation by library/open access desk
1
20.500.12860/42227
2023-07-28T17:39:47Z
*Selected version
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