Browsing Articles by imec author "efc61bf769711286fc005bc674fd92a81c50f7c6"
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80 nm tall thermally stable cost effective FinFETs for advanced dynamic random access memory periphery devices for artificial intelligence/machine learning and automotive applications
Spessot, Alessio; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Dupuy, Emmanuel; O'Sullivan, Barry; Bastos, Joao; Capogreco, Elena; Miyaguchi, Kenichi; Machkaoutsan, Vladimir; Yoon, Younggwang; Fazan, Pierre; Horiguchi, Naoto (2021) -
CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits
Dentoni Litta, Eugenio; Ritzenthaler, Romain; Schram, Tom; Spessot, Alessio; O'Sullivan, Barry; Machkaoutsan, Vladimir; Fazan, Pierre; Ji, Yunhyuck; Mannaert, Geert; Lorant, Christophe; Sebaai, Farid; Thiam, Arame; Ercken, Monique; Demuynck, Steven; Horiguchi, Naoto (2018) -
Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Machkaoutsan, Vladimir; Verheyen, Peter; Bauer, M.; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Loo, Roger; Kim, C.S.; Lauwers, Anne; Horiguchi, Naoto; Kerner, Christoph; Hoffmann, Thomas; Granneman, E.; Vandervorst, Wilfried; Absil, Philippe; Thomas, S.G. (2010) -
Factors influencing the leakage current in embedded SiGe source/drain junctions
Simoen, Eddy; Bargallo Gonzalez, Mireia; Vissouvanadin Soubaretty, Bertrand; Chowdhury, Mohammad Kamruzzaman; Verheyen, Peter; Hikavyy, Andriy; Bender, Hugo; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2008) -
Impact of dimensions of memory periphery FinFETs on bias temperature instability
Boubaaya, M; O'Sullivan, Barry; Djezzar, B; Franco, Jacopo; Dentoni Litta, Eugenio; Ritzenthaler, Romain; Dupuy, Emmanuel; Machkaoutsan, Vladimir; Fazan, Pierre; Kim, C.; Benaceur-Doumaz, D.; Ferhat Hamida, A.; Spessot, Alessio; Linten, Dimitri; Horiguchi, Naoto (2020) -
Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Machkaoutsan, Vladimir; Mertens, Sofie; Bauer, R.; Lauwers, Anne; Verheyden, Kurt; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Caymax, Matty; Jakschik, Stefan; Theodore, D.; Absil, Philippe; Thomas, S.; Granneman, E.H.A. (2007) -
Influence of the strain-relaxation induced defect creation on the lekage current of embedded Si1-xGex source/drain junctions
Bargallo Gonzalez, Mireia; Simoen, Eddy; Vissouvanadin Soubaretty, Bertrand; Eneman, Geert; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, Shawn (2009-06) -
Leakage current study of Si1-xCx embedded source/drain junctions
Simoen, Eddy; Vissouvanadin Soubaretty, Bertrand; Taleb, Nadjib; Bargallo Gonzalez, Mireia; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Bauer, Matthias; Thomas, Shawn; Lu, J.-P.; Wise, Rick (2008) -
Low temperature epitaxy and the importance of moisture control
Leys, Frederik; Hikavyy, Andriy; Machkaoutsan, Vladimir; De Vos, Brecht; Geenen, Luc; Van Daele, Benny; Loo, Roger; Caymax, Matty (2008) -
Overview of bias temperature instability in scaled DRAM logic for memory transistors
O'Sullivan, Barry; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Simoen, Eddy; Machkaoutsan, Vladimir; Fazan, Pierre; Ji, Yunhyuck; Cheolygu, Kim; Spessot, Alessio; Linten, Dimitri; Horiguchi, Naoto (2020) -
Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species
Delabie, Annelies; Swerts, Johan; Van Elshocht, Sven; Jung, Sung-Hoon; Raisanen, Petri; Givens, Michael; Shero, Eric; Peeters, Jozef; Machkaoutsan, Vladimir; Maes, Jan (2011-03) -
Stability of silicon germanium stressors
Tomasini, Pierre; Machkaoutsan, Vladimir; Thomas, Shawn; Loo, Roger; Caymax, Matty; Verheyen, Peter (2010) -
Strain enhanced NMOS using in situ doped embedded Si1-xCx S/D stressors with up to 1.5% substitutional carbon content grown using a novel deposition process
Verheyen, Peter; Machkaoutsan, Vladimir; Bauer, Matthias; Weeks, Doran; Kerner, Christoph; Bender, Hugo; Shamiryan, Denis; Loo, Roger; Hoffmann, Thomas; Absil, Philippe; Biesemans, Serge; Thomas, Shawn G. (2008-06) -
Stress analysis of Si1-xGex embedded source/drain junctions
Bargallo Gonzalez, Mireia; Simoen, Eddy; Naka, N.; Okuno, Y; Eneman, Geert; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, S.G.; Lu, J.P; Wise, Rick (2008)