Browsing Presentations by imec author "309b865458368af1c817224f44c024611e2a9d97"
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3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
Qiu, Yang; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried (2014) -
A high-reliable Cu/ULK integration scheme using Metal Hard Mask and Low-k capping film
Travaly, Youssef; Tsutsue, M.; Ikeda, Atsushi; Verdonck, Patrick; Tokei, Zsolt; Willegems, Myriam; Van Aelst, Joke; Struyf, Herbert; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Claes, Martine; Heylen, Nancy; Sinapi, Fabrice; Richard, Olivier; De Roest, David; Kaneko, S; Kemeling, N; Fukazawa, A; Matsuki, N; Matsushita, K; Tsuji, N; Kagami, K; Sprey, Hessel; Beyer, Gerald (2007) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Capabilities and limitations of Raman spectroscopy for carbon nanotubes analysis in the micro- and nano-electronics framework
Clemente, Francesca; Richard, Olivier; Hantschel, Thomas; Vandervorst, Wilfried (2007) -
Characterization of high-k films grown by atomic layer deposition
Vandervorst, Wilfried; Conard, Thierry; Petry, Jasmine; Brijs, Bert; Bender, Hugo; Richard, Olivier; Caymax, Matty; De Gendt, Stefan; Green, Martin; Cartier, Eduard; Copel, M. (2002) -
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, Timo; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi,; Brijs, Bert; Jonas, A.M.; Vantomme, Andre; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Compositional characterization of nickel silicides by HAADF-STEM imaging
Verleysen, Eveline; Bender, Hugo; Richard, Olivier; Schryvers, Dominique; Vandervorst, Wilfried (2010) -
Corrosion of FIBed Cu
Bender, Hugo; Richard, Olivier; Benedetti, Alessandro; Van Marcke, Patricia; Drijbooms, Chris (2005) -
Crystalline silicon thin films with porous Si backside reflector
Bilyalov, Renat; Poortmans, Jef; Richard, Olivier; Bender, Hugo; Kummer, M.; von Konel, H. (2001) -
Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Zhao, Chao; Richard, Olivier; Bender, Hugo; Houssa, Michel; Carter, Richard; De Gendt, Stefan; Heyns, Marc; Young, Edward; Tsai, Wilman; Roebben, G.; Van der Biest, O.; Haukka, S. (2001) -
Defect-free Si thinning by in-situ HCl vapour etching
Loo, Roger; Caymax, Matty; Richard, Olivier; Verheyen, Peter; Collaert, Nadine (2002) -
Development of methodologies for characterizing individual carbon nanotubes and silicon nanowires for use in nanoelectronics technology
Hantschel, Thomas; Cott, Daire; Palanne, Saku; Richard, Olivier; Arstila, Kai; Verhulst, Anne; Schulz, Volker; Eyben, Pierre; Vandervorst, Wilfried (2008) -
Effect of N2 annealing on AlxZryOz oxide
Petry, Jasmine; Richard, Olivier; Vandervorst, Wilfried; Conard, Thierry; Chen, Jerry; Cosnier, Vincent (2002) -
Focused ion beam sample preparation: applications in materials science
Bender, Hugo; Benedetti, Alessandro; Richard, Olivier; Van Marcke, Patricia; Drijbooms, Chris (2003) -
Growth and characterization of atomic layer deposited WCxNy
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, T.; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi, Simone; Brijs, Bert; Jonas, A.M.; Vantomme, A.; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications
Caymax, Matty; Brijs, Bert; Carter, Richard; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Richard, Olivier; Vandervorst, Wilfried; Zhao, Chao; Maes, Jan; Chen, Jerry; Cosnier, Vincent; Green, Martin; Kaushik, Vidya; Kluth, Jon; Tsai, Wilman (2002) -
Growth kinetics and relaxation mechanism of very thin epitaxial Si films on (100) germanium
Bonzom, Renaud; Leys, Frederik; Loo, Roger; Richard, Olivier; Vanhaeren, Danielle; Rip, Jens; Van Steenbergen, Jan; De Jaeger, Brice; Bender, Hugo; Vandervorst, Wilfried; Caymax, Matty; Meuris, Marc (2005) -
Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping film
Tsutsue, Makoto; Travaly, Youssef; Ikeda, Atsushi; Tokei, Zsolt; Willegems, Myriam; Struyf, Herbert; Sinapi, Fabrice; Richard, Olivier; Kemeling, Nathan; De Roest, David; Fukuzawa, A.; Matsuki, N.; Sprey, Hessel; Beyer, Gerald (2007) -
Impact of line height on copper resistivity and interconnect RC delay: a geometry approach to reduce the size effect
Zhang, Wenqi; Brongersma, Sywert; Van Aelst, Joke; Richard, Olivier; Bamal, Mandeep; Heylen, Nancy; Li, Yunlong; Beyer, Gerald; Maex, Karen (2005) -
Interface formation in rare-earth oxide containing advanced gate stacks
Adelmann, Christoph; Ferain, Isabelle; Franquet, Alexis; Conard, Thierry; Witters, Thomas; Richard, Olivier; Bender, Hugo; Meersschaut, Johan; Kittl, Jorge; Van Elshocht, Sven (2008)