Browsing Presentations by imec author "80dd9ecda1d431bdcee1f3de547708cb6771c818"
Now showing items 1-11 of 11
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Applications of dynamic surface annealing for high-performance Si and Ge based MOS devices
Rosseel, Erik; Everaert, Jean-Luc; Hikavyy, Andriy; Witters, Liesbeth; Mitard, Jerome; Vandervorst, Wilfried (2011) -
Conformal doping for FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008) -
Evaluation of backside passivation using laser annealing in backside illuminated image sensors
Minoglou, Kiki; De Munck, Koen; Malachowski, Karl; Sabuncuoglu Tezcan, Deniz; Everaert, Jean-Luc; Haspeslagh, Luc; Mazzamuto, Fulvio; Toqué-Trésonne, Ines; Huet, Karim; De Moor, Piet (2013) -
High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes
Johnson, Jo; Lisoni, Judit; Everaert, Jean-Luc; Wouters, Dirk (2002) -
High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes
Johnson, Jo; Cella, Silvia; Lisoni, Judit; Everaert, Jean-Luc; Wouters, Dirk (2002) -
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schuster, Thomas; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser anneal
Nguyen, N.D.; Souriau, Laurent; Shimizu, Y.; Jiang, Sijia; Rosseel, Erik; Everaert, Jean-Luc; Moussa, Alain; Clarysse, Trudo; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty (2011) -
Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor (2010) -
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk (2002) -
Physical properties of thin nitrided Hf silicates and their impact on the performance of advanced transistors having a TaN metal gate electrode
Cubaynes, Florence; van der marel, C.; Hopstaken, M.J.P.; Van Elshocht, Sven; Everaert, Jean-Luc; Schaekers, Marc (2005) -
Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Schwitters, M.; Everaert, Jean-Luc; Lisoni, Judit; Paraschiv, Vasile; Goux, Ludovic; Wouters, Dirk; Monchoix, H.; Caputa, Concetta; Zambrano, R. (2004)