Browsing by Author "De Witte, Hilde"
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Publication ALCVD hafnium silicates for low power gate stacks
Oral presentation2004, Atomic Layer Deposition ConferencePublication Alternative gate insulator materials for future generation MOSFETs
Oral presentation2001, International Forum on Semiconductor Technology - IFST; 7-8 March 2001; Antwerpen, Belgium.Publication Analytical characterization of new high k dielectric stacks
Oral presentation2000, Quantitative Surface Analysis-11; 3-7 July 2000; Surrey, UK.Publication Artifacts in SIMS depth profiling
Oral presentation1997, SIMS XI; 8-12 September 1997; Orlando, Fl., USA.Publication Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.147-159Publication Characterization of (ultra)thin dielectrica
Oral presentation2000, Quantitative Surface Analysis-11; 3-7 July 2000; Surrey, UK.Publication Characterization of ultra thin oxynitrides, a general approach
Oral presentation1999, IBA-14-ECAART-6; July 1999; Dresden, Germany.Publication Characterization of ultra thin oxynitrides: a general approach
Journal article2000, Nuclear Instruments and Methods B, 161-163, p.429-434Publication Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers
Oral presentation1999, SIMS XII; 5-10 September 1999; Brussel, Belgium.Publication Engineering ALCVD HfSiO gate stacks for LSTP applications
Oral presentation2005, AVS 5th International Conference on ALDPublication Evaluation of Nb(Si)N as metal gate material
; ; ; Huatori, H.Meeting abstract2005, Meeting Abstracts 208th Electrochemical Society Meeting, 16/10/2005Publication Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces
Journal article2000, Journal of the Electrochemical Society, (147) 5, p.1915-1919Publication Fundamental study of ion-substrate interactions with low energy reactive ions
De Witte, HildePHD thesis2001-03Publication High k dielectric materials prepared by atomic layer CVD
Oral presentation2001, 12th INFOS Conference - Insulating Films on Semiconductors; June 2001; Udine, Italy.Publication High resolution dopant/carrier profiling for deep submicron technologies
Oral presentation1999, 9th Canadian Semiconductor Technology Conference; July 1999; Ottawa, Canada.Publication Improved phosphoric acid mixtures for nitride strip
; ; ; ; ; Hatcher, Z.Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.43-46Publication In-line electrical metrology for high-k gate dielectrics deposited by atomic layer chemical vapour deposition
Journal article2002-09, Semiconductor Fabtech, 17, p.111-115Publication In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
Journal article2003, Journal of the Electrochemical Society, (150) 9, p.F169-F172Publication In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
Meeting abstract2002, 201st Meeting of the Electrochemical Society. Rapid Thermal and Other Short Time Processing Technologies III, 12/05/2002, p.719
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