Browsing by Author "Deleu, Jeroen"
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Publication Accurate determination of Si sputter yield in the transient region
Oral presentation1999, SIMS XII; 5-10 September 1999; Brussel, Belgium.Publication Advanced capabilities and applications of a sputter-RBS system
Proceedings paper1999, Applications of Accelerators in Research and Industry: Proceedings of the 15th International Conference, 4/11/1998, p.586-591Publication Advanced capabilities and applications of a sputter-RBS system
Oral presentation1998, 15th International Conference on the Application of Accelerators in Research and Industry; 4-7 November 1998; Denton, TX, USA.Publication Advanced RBS analysis of thin films in micro-electronics
Oral presentation2000, 16th International Conference on the Application of Accelerators in Research and Industry - CAARI; 1-4 November 2000; Denton, TXPublication Advanced RBS analysis of thin films in micro-electronics
Proceedings paper2001, Application of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000., p.470-475Publication ARIBA, An All Round Ion Beam Acquisition Program
Oral presentation1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, UPublication ARIBA, an all round ion beam acquisition program
Proceedings paper1997, Application of Accelerators in Research and Industry, 6/11/1996, p.673-676Publication Characterization of ultra thin layers by Rutherford backscattering spectrometry
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.160-169Publication Characterization of ultra thin oxynitrides, a general approach
Oral presentation1999, IBA-14-ECAART-6; July 1999; Dresden, Germany.Publication Characterization of ultra thin oxynitrides: a general approach
Journal article2000, Nuclear Instruments and Methods B, 161-163, p.429-434Publication Elastic recoil detection of hydrogen in combination with low energy argon sputtering
Oral presentation1997, Ion Beam Analysis-13; 27 July - 1 August 1997; Lisboa, Portugal.Publication In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 118, p.82-87Publication Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition
Oral presentation1999, SIMS XII; 5-10 September 1999; Brussel, Belgium.Publication SPECTAC, a fully ethernet controlled Spectrum Acquisition Program for RBS, PIXE and NRA
Oral presentation1998, 15th International Conference on the Application of Accelerators in Research and Industry; 4-7 November 1998; Denton, TX, USA.Publication Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 118, p.541-546Publication Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS
Oral presentation1997, SIMS XI; 8-12 September 1997; Orlando, Florida, USA.Publication Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS
Proceedings paper1998, SIMS XI - Secondary Ion Mass Spectrometry, 8/09/1997, p.359-362Publication The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 113, p.534-538Publication Transient phenomena of silicon under oxygen bombardment
Oral presentation1998, SIMS Europe Workshop; 4-6 October 1998; Münster, Germany.Publication Transient sputter yields of silicon with and without oxygen flooding
Oral presentation1998, 11th Annual SIMS Workshop; 10-13 May 1998; Austin, TX, USA.