Browsing by Author "Fouchier, Marc"
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Publication Assessing the performance of two-dimensional dopant profiling techniques
Journal article2004, Journal of Vacuum Science and Technology, (22) 1, p.385-393Publication Assessing the performance of two-dimensional dopant profiling techniques
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Automated assembly of holder chips to AFM probes
Publication Characterization of different tip materials for SCM
Meeting abstract2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.213Publication Dopant profiling in NixSi1-x gates with SIMS
Proceedings paper2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005Publication Fabrication and characterization of full diamond tips for scanning-spreading resistance microscopy
Journal article2004-06, Microelectronic Engineering, 73-74, p.910-915Publication Fabrication of conductive AFM probes and their use in microelectronics
Oral presentation2003, Veeco SPM Conference and Users MeetingPublication Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Proceedings paper2003-05, Smart Sensors, Actuators, and MEMS, 19/05/2003, p.607-616Publication High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Meeting abstract2003, 7th International Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, 27/04/2003, p.184Publication High-resolution scanning spreading resistance microscopy of surrounding-gate transistors
Publication Overview of 2D profiling in Imec
Meeting abstract2003, Veeco SPM User Meeting, 20/03/2003Publication Probing local electrical properties in semiconductors with nanometer resolution
Oral presentation2003, WOG Studiedag Scanning ProbesPublication Probing semiconductor technology and devices with scanning spreading resistance microscopy
Book chapter2007Publication Pulsed force-scanning spreading resistance microscopy (PF-SSRM) for high spatial resolution 2D-dopant profiling
Proceedings paper2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.297Publication Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM
Oral presentation2003, International Meeting on Seeing at the NanoscalePublication Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
Journal article2003, Microelectronic Engineering, 67-68, p.945-950Publication Scanning spreading resistance microscopy of fully depleted SOI devices
Publication Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips
Journal article2003, Applied Physics Letters, (82) 11, p.1724-1726Publication Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices
Oral presentation2004, MRS Fall Meeting Symposium O: Scanning-Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials