Browsing by Author "Mody, Jay"
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Publication 3D-carrier profiling in FinFETs using scanning spreading resistance microscopy
Proceedings paper2011, IEEE International Electron Devices Meeting - IEDM, 5/12/2011, p.119-122Publication 3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Oral presentation2011, E-MRS Symposium I: Transport in Si-based NanodevicesPublication Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopy
Meeting abstract2008, Dutch Scanning Probe Microscopy Symposium - SPM, 8/12/2008Publication AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale
Meeting abstract2013, MRS Spring Meeting Symposium Y: Advances in Scanning Probe Microscopy for Imaging Functionality on the Nanoscale, 1/04/2013, p.Y6.01Publication Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Journal article2010, Journal of Vacuum Science and Technology B, (28) 2, p.401-406Publication Analysis and modeling of the HV-SSRM nanocontact on silicon
Meeting abstract2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Atom probe for FinFET dopant characterization
Meeting abstract2010, 52nd International Field Emission Symposium - IFES, 5/07/2010Publication Conformal doping for FINFET's: a fabrication and metrology challenge
Oral presentation2008, Stanford & Tohoku University Joint Open Workshop on 3D Transistor and its ApplicationsPublication Conformal doping of FINFET's: a fabrication and metrology challenge
Meeting abstract2008, E-MRS Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008Publication Conformal doping of FINFET's: a fabrication and metrology challenge
Proceedings paper2008, 17th International Conference in Ion Implantation Technology - IIT, 8/06/2008, p.449-456Publication Development and optimization of FIB-based sample preparation for SSRM
Oral presentation2010, E-MRS Fall Symposium D: Multidimensional electrical and chemical characterization at the nanometer-scale of organic ...Publication Dopant and carrier profiling for 3D-device architectures
Proceedings paper2011, International Workshop on Junction Technology, 7/06/2011Publication Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution
Proceedings paper2010, IEEE Symposium on VLSI Technology, 15/06/2010, p.195-196Publication Dopant/carrier profiling for 3D-structures
Journal article2014, Physica Status Solidi C, (11) 1, p.121-129Publication Dopant/carrier profiling in nanostructures
Proceedings paper2010, International Conference on Solid State Devices and Materials - SSDM, 22/09/2010, p.992-993Publication Electrical characterization of carbon nanotube based interconnects
Proceedings paper2011, BeNeLux SPM User meeting, 9/11/2011Publication Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification
Journal article2009, Nanotechnology, (20) 30, p.305705Publication Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1H5-C1H13
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