Browsing by Author "Ohashi, Takeyoshi"

3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

Contact inspection and resistance - capacitance measurement of Si nanowire with SEM voltage contrast

Contact inspection of Si nanowire with SEM voltage contrast

EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment

Electron beam metrology for advanced technology nodes

Enabling CD SEM metrology for 5nm technology node and beyond

Line width roughness accuracy analysis during pattern transfer in self-aligned quadruple patterning process

Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation

Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element