Browsing by Author "Petersen, Dirch"

Accurate micro Hall effect measurement on scribe line pads

Advanced carrier depth profiling on Si and Ge with M4PP

Fast micro Hall effect measurements on small pads

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

In-line sheet resistance measurements of nanometer-wide semiconducting fins

Micro probe carrier profiling of ultra-shallow structures in germanium

Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

On the analysis of the activation mechanisms of sub-melt laser anneals

Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Sheet-resistance measurements in nanometer-wide conductive lines

Study of submelt laser induced junction nonuniformities using Therma-Probe

Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe

Zero and one-dimensional electrical characterization of nanometer-wide Si fins