Browsing by Author "Polspoel, Wouter"

0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications

Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopy

Bipolar switching characteristics and scalability in NiO layers made by thermal oxidation of Ni

Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM

Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors

Comparison of standard macroscopic and conductive atomic force microscopy leakage measurements on gate removed high-k capacitors

Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes

Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFM

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Experimental studies of dose retention and activation in FinFet-based structures

High resolution study of high-k dielectrics with Conductive AFM

High resolution study of high-k layers using C-AFM

High-k dielectrics for future generation memory devices

Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes

Improved characterization of high-k degradation with vacuum C-AFM

Improved nano-scale characterization of high-k dielectrics with vacuum C-AFM

Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics

Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics

Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors

Nanoscale analysis of planar and 3D-Si-structures