Browsing by Author "Saadeh, Qais"

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Determination of optical constants of thin films in the EUV

Evaluation of Ta-Co alloys as novel high-k EUV mask absorber

Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

Mask absorber for next generation EUV lithography

Nested Sampling aided determination of tantalum optical constants in the EUV spectral range

On the optical constants of cobalt in the M-absorption edge region

Optical constants for EUV scatterometry

Optical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au, and ZrO2 in the extreme ultraviolet range

Optical constants of TiN, amorphous SiO2, and SiN in the extreme ultraviolet range

Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

Simulation of polychromatic effects in high NA EUV lithography

Study of novel EUVL mask absorber candidates

Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm

Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet