Browsing by Author "Saadeh, Qais"
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Publication Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
Journal article2021, MICRO AND NANO ENGINEERING, 12, p.100089Publication Determination of optical constants of thin films in the EUV
Journal article2022, APPLIED OPTICS, (61) 8, p.2060-2078Publication Evaluation of Ta-Co alloys as novel high-k EUV mask absorber
Proceedings paper2022, Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference, APR 24-MAY 27, 2022, p.120510DPublication Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber
Journal article2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 2, p.Art. 024403Publication Mask absorber for next generation EUV lithography
Proceedings paper2020, Conference on Extreme Ultraviolet Lithography, SEP 21-25, 2020Publication Nested Sampling aided determination of tantalum optical constants in the EUV spectral range
Journal article2022, APPLIED OPTICS, (61) 33, p.10032-10042Publication On the optical constants of cobalt in the M-absorption edge region
Journal article2023, OPTIK, (273) February, p.Art.: 170455Publication Optical constants for EUV scatterometry
Proceedings paper2021, Modeling Aspects in Optical Metrology VII, 21/06/2021, p.117830MPublication Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124963BPublication Precise optical constants: determination and impact on metrology, simulation and development of EUV masks
Publication Simulation of polychromatic effects in high NA EUV lithography
Publication Study of novel EUVL mask absorber candidates
Journal article2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 2Publication Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm
Journal article2021, OPTICS EXPRESS, (29) 25, p.40993-41013Publication Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet
Journal article2023, OPTICAL MATERIALS EXPRESS, (13) 1, p.78-91