Browsing by Author "Trenkler, Thomas"
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Publication 2D profiling with atomic force microscopy
Oral presentation1999, Digital Instruments Users Workshop; April 1999; Dresden, Germany.Publication Carrier Profile Determination in Device Structures using AFM-Based Methods
Oral presentation1995, International Workshop on Semiconductor Characterization: Present Status and Needs; January 1995; Gaithersburg, USA.Publication Characterization of conductive probes for atomic force microscopy
Proceedings paper1999, Design, Test, and Microfabrication of MEMS and MOEMS; 30 March - 1 April 1999; Paris, France., 30/03/1999, p.1168-1179Publication Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy
Proceedings paper1999, Design, Test, and Microfabrication of MEMS and MOEMS, 30/03/1999, p.994-1005Publication Diamond tips and cantilevers for the characterization of semiconductor devices
Journal article1999, Diamond and Related Materials, (8) 2_5, p.283-287Publication Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
Journal article1996, Scanning Microscopy, (10) 4, p.937-945Publication Electrical scanning probe techniques in semiconductor research
Oral presentation1999, DI-VEECO Users Workshop; September 1999; Bordeaux, France.Publication Epitaxial staircase structure for the calibration of electrical characterisation techniques
Proceedings paper1997, Proceedings 4th Int. Worksh. on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles in Semiconducto, 6/04/1997, p.30.1-30.1Publication Epitaxial staircase structure for the calibration of electrical characterization techniques
Journal article1998, Journal of Vacuum Science and Technology B, (16) 1, p.394-400Publication Evaluating probes for "electrical" atomic force microscopy
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427Publication Evaluating probes for "electrical" atomic force microscopy
Proceedings paper1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436Publication Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
Proceedings paper1998, Materials and Device Characterization in Micromachining, 21/09/1998, p.92-103Publication High resolution dopant/carrier profiling for deep submicron technologies
Oral presentation1999, 9th Canadian Semiconductor Technology Conference; July 1999; Ottawa, Canada.Publication High Temperature EPMA in Combination with Depth Profiling and Scanning Techniques for Investigation pf WTi(N)-Cu Systems
Publication Highly conductive diamond probes for scanning spreading resistance microscopy
Journal article2000, Applied Physics Letters, (76) 12, p.1603-1605Publication Improved understanding and characterisation of rapid thermal oxides
Publication Local potential measurements in silicon devices using atomic force microscopy with conductive tips
Proceedings paper1995, 25th European Solid State Device Research Conference - ESSDERC, 25/09/1995, p.477-481Publication Material transport in copper-solder-micro-contacts under electric current
Publication Nanometer scale characterization of deep submicron devices
Oral presentation1999, Materials Research Society Spring Meeting: Symposium S on Si Front-End Processing - Physics and Technology of Dopant-Defect Inte
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