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Browsing by Author "Xu, Zhen"

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    A study of relaxation current in high-k gate stacks

    Xu, Zhen
    ;
    Pantisano, Luigi
    ;
    Kerber, Andreas
    ;
    Degraeve, Robin  
    ;
    Cartier, Eduard
    ;
    De Gendt, Stefan  
    Journal article
    2004-03, IEEE Trans. Electron Devices, (51) 3, p.402-408
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    Charge trapping in metal-ferroelectric-insulator-semiconductor structure with SrBi2Ta2O9/Al2O3/SiO2 stack

    Xu, Zhen
    ;
    Kaczer, Ben  
    ;
    Johnson, Jo
    ;
    Wouters, Dirk
    ;
    Groeseneken, Guido  
    Journal article
    2004-08, Journal of Applied Physics, (96) 3, p.1614-1619
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    Constant voltage stress induced degradation in HfO2/SiO2 gate dielectric stacks

    Xu, Zhen
    ;
    Houssa, Michel  
    ;
    Carter, Richard
    ;
    Naili, Mohamed
    ;
    De Gendt, Stefan  
    ;
    Heyns, Marc  
    Journal article
    2002, Journal of Applied Physics, (91) 12, p.10127-10129
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    Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices

    Goux, Ludovic  
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    Xu, Zhen
    ;
    Kaczer, Ben  
    ;
    Groeseneken, Guido  
    ;
    Wouters, Dirk
    Journal article
    2005-06, Microelectronic Engineering, 80C, p.162-165
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    Electrical characterization of SrBi2Ta2O2O9(SBT)/high-k gate stack in metal-ferroelectric-insulator-semiconductor structure

    Xu, Zhen
    PHD thesis
    2005-09
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    Electrical properties of Al2O3/ZrO2/Al2O3 gate stack in p-substrate metal oxide semiconductor devices

    Xu, Zhen
    ;
    Kaczer, Ben  
    ;
    Degraeve, Robin  
    ;
    De Gendt, Stefan  
    ;
    Heyns, Marc  
    ;
    Groeseneken, Guido  
    Journal article
    2003, Journal of the Electrochemical Society, (150) 5, p.G307-G310
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    HfO2 and HfSixOyNz high-k layers deposited by MOCVD in mixed gas flows of N2O and O2

    Zhao, Chao
    ;
    Van Elshocht, Sven  
    ;
    Conard, Thierry  
    ;
    Xu, Zhen
    ;
    Richard, Olivier  
    ;
    Caymax, Matty  
    Proceedings paper
    2004, Physics and Technology of High-k Gate Dielectrics II, 12/10/2003, p.101-111
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    HfONx high-k layers deposited by MOCVD in mixed gas flows of N2O and O2

    Zhao, Chao
    ;
    Van Elshocht, Sven  
    ;
    Conard, Thierry  
    ;
    Xu, Zhen
    ;
    Caymax, Matty  
    ;
    De Gendt, Stefan  
    Meeting abstract
    2003, 204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials, 13/10/2003
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    Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors

    Goux, Ludovic  
    ;
    Xu, Zhen
    ;
    Paraschiv, Vasile  
    ;
    Schwitters, M.
    ;
    Lisoni, Judit
    ;
    Maes, David
    Oral presentation
    2004, Journées Couches Ferroelectriques - JCF
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    Issues, achievements and challenges towards intergration of high-k dielectrics

    Heyns, Marc  
    ;
    Bender, Hugo  
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    Caymax, Matty  
    ;
    Carter, R
    ;
    Claes, Martine  
    ;
    Conard, Thierry  
    Proceedings paper
    2002, 5th International Forum on Semiconductor Technology - IFST, 21/02/2002
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    Optimization of the ferroelectric film for application in scaled FeFET

    Viapiana, Matteo
    ;
    Xu, Zhen
    ;
    Goux, Ludovic  
    ;
    Kaczer, Ben  
    ;
    Groeseneken, Guido  
    ;
    Wouters, Dirk
    Oral presentation
    2004, MRS Fall Meeting Symposium D: Materials and Processes for Nonvolatile Memories
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    Polarity effect on the temperature dependence of leakage current through HfO2/SiO2 gate dielectric stacks

    Xu, Zhen
    ;
    Houssa, Michel  
    ;
    De Gendt, Stefan  
    ;
    Heyns, Marc  
    Journal article
    2002, Applied Physics Letters, (80) 11, p.1975-1977
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    Selection of ferroelectric/high-k gate stack combination for optimized FeFET performance

    Xu, Zhen
    ;
    Viapiana, Matteo
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    Kaczer, Ben  
    ;
    Goux, Ludovic  
    ;
    Groeseneken, Guido  
    ;
    Wouters, Dirk
    Oral presentation
    2004, MRS Fall Meeting Symposium D: Materials and Processes for Nonvolatile Memories
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    Thermal stability and scalability of zr-aluminate-based high-k gate stacks

    Chen, Jerry
    ;
    Cartier, Eduard
    ;
    Carter, Richard
    ;
    Kauerauf, Thomas
    ;
    Zhao, Chao
    ;
    Pétry, Jasmine
    Proceedings paper
    2002, Symposium on VLSI Technology: Digest of Technical Papers, 11/06/2002, p.192-193

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