Browsing by author "Tan, Chi Lim"

15nm HP patterning with EUV and SADP: key contributors for improvement of LWR, LER, and CDU

Xu, Kaidong; Souriau, Laurent; Hellin, David; Versluijs, Janko; Wong, Patrick; Vangoidsenhoven, Diziana; Vandenbroeck, Nadia; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Tan, Chi Lim; Vertommen, Johan; Coenegrachts, Bart; Orain, I.; Kimura, Y.; Wiaux, Vincent; Boullart, Werner (2013)

3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Raymaekers, Tom; Van den Bosch, Geert; Furnemont, Arnaud; Lorusso, Gian (2017)

Analysis of performance/variability trade-off in Macaroni-type 3-D NAND Memory

Congedo, Gabriele; Arreghini, Antonio; Liu, Lifang; Capogreco, Elena; Lisoni, Judit; Huet, Karim; Toque-Tresonne, Ines; Van Aerde, Steven; Toledano Luque, Maria; Tan, Chi Lim; Van den Bosch, Geert; Van Houdt, Jan (2014)

Enabling CD SEM metrology for 5nm technology node and beyond

Lorusso, Gian; Ohashi, Takeyoshi; Yamaguchi, Astuko; Inoue, Osamu; Sutani, Takumichi; Horiguchi, Naoto; Boemmels, Juergen; Wilson, Chris; Briggs, Basoene; Tan, Chi Lim; Raymaekers, Tom; Delhougne, Romain; Van den Bosch, Geert; Di Piazza, Luca; Kar, Gouri Sankar; Furnemont, Arnaud; Fantini, Andrea; Donadio, Gabriele Luca; Souriau, Laurent; Crotti, Davide; Yasin, Farrukh; Appeltans, Raf; Rao, Siddharth; De Simone, Danilo; Rincon Delgadillo, Paulina; Leray, Philippe; Charley, Anne-Laure; Zhou, Daisy; Veloso, Anabela; Collaert, Nadine; Hasumi, Kazuhisa; Koshihara, Shunsuke; Ikota, Masami; Okagawa, Yutaka; Ishimoto, Toru (2017)

Experimental and theoretical verification of channel conductivity degradation due to grain boundaries and defects in 3D NAND

Subirats, Alexandre; Arreghini, Antonio; Capogreco, Elena; Delhougne, Romain; Tan, Chi Lim; Hikavyy, Andriy; Breuil, Laurent; Degraeve, Robin; Putcha, Vamsi; Van den Bosch, Geert; Linten, Dimitri; Furnemont, Arnaud (2017)

Experimental study of programming saturation in low-coupling planar high-k/metal gate Nand flash memory cells using a dedicated test structure

Blomme, Pieter; Tan, Chi Lim; Souriau, Laurent; Versluijs, Janko; Van den Bosch, Geert; Van Houdt, Jan (2014)

Feasibility of InxGa1-xAs high mobility channel for 3-D NAND memory

Capogreco, Elena; Subirats, Alexandre; Lisoni, Judit Gloria; Arreghini, Antonio; Kunert, Bernardette; Guo, Weiming; Tan, Chi Lim; Delhougne, Romain; Van den Bosch, Geert; De Meyer, Kristin; Furnemont, Arnaud; Van Houdt, Jan (2017)

In depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devices

Tan, Chi Lim; Lavizzari, Simone; Blomme, Pieter; Breuil, Laurent; Vecchio, Emma; Sebaai, Farid; Paraschiv, Vasile; Tao, Zheng; Schepers, Bart; Nyns, Laura; Peter, Antony; Dekkers, Harold; Ong, Patrick; Tsvetanova, Diana; Devriendt, Katia; Teugels, Lieve; Heylen, Nancy; Raymaekers, Tom; Jossart, Nico; Mennella, Pasquale; Delhougne, Romain; Vadakupudhu Palayam, Senthil; Arreghini, Antonio; Van den Bosch, Geert; Furnemont, Arnaud (2017)

Integration of a multi-layer inter-gate dielectric with hybrid floating gate towards 10nm planar NAND flash

Breuil, Laurent; Blomme, Pieter; Tan, Chi Lim; Lisoni, Judit; Souriau, Laurent; Zahid, Mohammed; Richard, Olivier; Bender, Hugo; Van den Bosch, Geert; Van Houdt, Jan (2014)

Intergate dielectric engineering towards large P/E window planar NAND flash

Breuil, Laurent; Lisoni, Judit; Blomme, Pieter; Tan, Chi Lim; Van den Bosch, Geert; Van Houdt, Jan (2015)

Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash

Blomme, Pieter; Versluijs, Janko; Ercken, Monique; Souriau, Laurent; Hody, Hubert; Vecchio, Emma; Paraschiv, Vasile; Tan, Chi Lim; Van den Bosch, Geert; Van Houdt, Jan (2016-05)

Key contributors for improvement of line width roughness, line edge roughness, and critical dimension uniformity: 15 nm half-pitch patterning with extreme ultraviolet and self-aligned double patterning

Xu, Kaidong; Souriau, Laurent; Hellin, David; Versluijs, Janko; Wong, Patrick; Vangoidsenhoven, Diziana; Vandenbroeck, Nadia; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Tan, Chi Lim; Vertommen, Johan; Coenegrachts, Bart; Orain, Isabelle; Kimura, Yoshie; Wiaux, Vincent; Boullart, Werner (2013-09)